Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition
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2019 ◽
Vol 11
(16)
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pp. 14892-14901
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2010 ◽
Vol 57
(6)
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pp. 1472-1476
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2020 ◽
Vol 46
(9)
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pp. 13033-13039
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2018 ◽
Vol 58
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pp. 328-333
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2015 ◽
Vol 349
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pp. 757-762
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