Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5047237 ◽

2018 ◽

Vol 36 (6) ◽

pp. 060801 ◽

Author(s):

Jiazhen Sheng ◽

Jung-Hoon Lee ◽

Wan-Ho Choi ◽

TaeHyun Hong ◽

MinJung Kim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Research And Development ◽

Thin Film Transistors ◽

Atomic Layer ◽

Review Article ◽

Oxide Semiconductor ◽

Layer Deposition ◽

Semiconductor Thin Film

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Review of recent progresses on flexible oxide semiconductor thin film transistors based on atomic layer deposition processes

Journal of Semiconductors ◽

10.1088/1674-4926/39/1/011008 ◽

2018 ◽

Vol 39 (1) ◽

pp. 011008 ◽

Author(s):

Jiazhen Sheng ◽

Ki-Lim Han ◽

TaeHyun Hong ◽

Wan-Ho Choi ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Semiconductor ◽

Layer Deposition ◽

Semiconductor Thin Film ◽

Deposition Processes

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Resistive Switching in Zinc-Tin-Oxide and Atomic Layer Deposition of Nanolaminates for Amorphous Oxide Semiconductor Thin Film Transistors

ECS Meeting Abstracts ◽

10.1149/ma2012-02/41/3009 ◽

2012 ◽

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tin Oxide ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Semiconductor ◽

Amorphous Oxide Semiconductor ◽

Layer Deposition ◽

Zinc Tin Oxide ◽

Semiconductor Thin Film

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Recent Progress on Metal Oxide Semiconductor Thin Film Transistor Application via Atomic Layer Deposition Method

TMS 2019 148th Annual Meeting & Exhibition Supplemental Proceedings - The Minerals, Metals & Materials Series ◽

10.1007/978-3-030-05861-6_10 ◽

2019 ◽

pp. 115-120

Author(s):

Jiazhen Sheng ◽

Jung-Hoon Lee ◽

Tae-Hyun Hong ◽

Wan-Ho Choi ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Recent Progress ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Semiconductor ◽

Deposition Method ◽

Layer Deposition ◽

Atomic Layer Deposition Method ◽

Semiconductor Thin Film

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Superior Atomic Layer Deposition Technology for Amorphous Oxide Semiconductor Thin-Film Transistor Memory Devices

Chemistry of Materials ◽

10.1021/acs.chemmater.9b03237 ◽

2020 ◽

Vol 32 (4) ◽

pp. 1343-1357 ◽

Author(s):

Shi-Jin Ding ◽

Xiaohan Wu

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Semiconductor ◽

Memory Devices ◽

Amorphous Oxide Semiconductor ◽

Layer Deposition ◽

Semiconductor Thin Film ◽

Deposition Technology

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The Influence of Hydrogen on Defects of In–Ga–Zn–O Semiconductor Thin-Film Transistors With Atomic-Layer Deposition of Al2O3

IEEE Electron Device Letters ◽

10.1109/led.2016.2594258 ◽

2016 ◽

Vol 37 (9) ◽

pp. 1131-1134 ◽

Author(s):

Taeho Kim ◽

Yunyong Nam ◽

Jihyun Hur ◽

Sang-Hee Ko Park ◽

Sanghun Jeon

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Layer Deposition ◽

Semiconductor Thin Film

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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Enhancement of Electrical Stability in Oxide Thin-Film Transistors Using Multilayer Channels Grown by Atomic Layer Deposition

IEEE Transactions on Electron Devices ◽

10.1109/ted.2013.2288925 ◽

2014 ◽

Vol 61 (1) ◽

pp. 73-78 ◽

Author(s):

Cheol Hyoun Ahn ◽

Myung Gu Yun ◽

Sang Yeol Lee ◽

Hyung Koun Cho

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Electrical Stability ◽

Layer Deposition

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8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15043 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 141-141

Author(s):

Dedong Han ◽

Huijin Li ◽

Junchen Dong ◽

Xiaobin Zhou ◽

Qi Li ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Deposition Process ◽

Oxide Thin Film ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15164 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 472-476

Author(s):

Qi Li ◽

Huijin Li ◽

Junchen Dong ◽

Jingyi Wang ◽

Dedong Han ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Zno Thin Film ◽

Layer Deposition

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P‐1.7: Atomic‐Layer‐Deposition Deposited Superlattice‐Structure Al‐Zn‐O Films for Thin Film Transistors Application

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15255 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 696-698

Author(s):

Jingyi Wang ◽

Junchen Dong ◽

Qi Li ◽

Dengqin Xu ◽

Yi Wang ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Superlattice Structure ◽

Layer Deposition

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