Post Deposition Annealing Atmosphere Effect on SSI-LEDs Made of Zr-Doped
HfO2 High-k Gate Dielectric
Keyword(s):
High K
◽
2017 ◽
Vol 7
(1)
◽
pp. R3023-R3029
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Keyword(s):
2008 ◽
Vol 23
(5)
◽
pp. 865-871
◽
2005 ◽
Vol 38
(3)
◽
pp. 442-445
◽