scholarly journals Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

2012 ◽  
Vol 2012 ◽  
pp. 1-9 ◽  
Author(s):  
Shinji Yasui ◽  
Tadashi Shojo ◽  
Goichi Inoue ◽  
Kunihiko Koike ◽  
Akihiro Takeuchi ◽  
...  

We have been developing a new dry-type off-gas treatment system for recycling fluorine from perfluoro compounds present in off-gases from the semiconductor industry. The feature of this system is to adsorb the fluorine compounds in the exhaust gases from the decomposition furnace by using two types of solid adsorbents: the calcium carbonate in the upper layer adsorbs HF and converts it to CaF2, and the sodium bicarbonate in the lower layer adsorbs HF and SiF4and converts them to Na2SiF6. This paper describes the fluorine compound adsorption properties of both the solid adsorbents—calcium carbonate and the sodium compound—for the optimal design of the fixation furnace. An analysis of the gas-solid reaction rate was performed from the experimental results of the breakthrough curve by using a fixed-bed reaction model, and the reaction rate constants and adsorption capacity were obtained for achieving an optimal process design.

1981 ◽  
Vol 14 (6) ◽  
pp. 450-455 ◽  
Author(s):  
NOBORU SAKAI ◽  
TADASHI CHIDA ◽  
TEIRIKI TADAKI

1976 ◽  
Vol 7 (5) ◽  
pp. 307-320 ◽  
Author(s):  
G. S. Bremmeng ◽  
A. E. Kloster

Transjøen, a lake in S.E. Norway investigated hydrographically from October 1969 to October 1971, consists of two basins, both of which are meromictic (lake with lower layer which does not participate in the periodic circulations). The lake has a large influx of groundwater of very varying chemical composition. The calcium content is high and precipitated calcium carbonate and electrolyte rich groundwater is assumed to be the main reason for the meromictic stability. The redox potentials of monimolimnion (the lower layer which does not participtate in the periodic circulation) are extremely low, but in spite of this fact the content of sulphate is high.


2021 ◽  
Vol 11 (2) ◽  
pp. 682
Author(s):  
Gabriele Seitz ◽  
Farid Mohammadi ◽  
Holger Class

Calcium oxide/Calcium hydroxide can be utilized as a reaction system for thermochemical heat storage. It features a high storage capacity, is cheap, and does not involve major environmental concerns. Operationally, different fixed-bed reactor concepts can be distinguished; direct reactor are characterized by gas flow through the reactive bulk material, while in indirect reactors, the heat-carrying gas flow is separated from the bulk material. This study puts a focus on the indirectly operated fixed-bed reactor setup. The fluxes of the reaction fluid and the heat-carrying flow are decoupled in order to overcome limitations due to heat conduction in the reactive bulk material. The fixed bed represents a porous medium where Darcy-type flow conditions can be assumed. Here, a numerical model for such a reactor concept is presented, which has been implemented in the software DuMux. An attempt to calibrate and validate it with experimental results from the literature is discussed in detail. This allows for the identification of a deficient insulation of the experimental setup. Accordingly, heat-loss mechanisms are included in the model. However, it can be shown that heat losses alone are not sufficient to explain the experimental results. It is evident that another effect plays a role here. Using Bayesian inference, this effect is identified as the reaction rate decreasing with progressing conversion of reactive material. The calibrated model reveals that more heat is lost over the reactor surface than transported in the heat transfer channel, which causes a considerable speed-up of the discharge reaction. An observed deceleration of the reaction rate at progressed conversion is attributed to the presence of agglomerates of the bulk material in the fixed bed. This retardation is represented phenomenologically by mofifying the reaction kinetics. After the calibration, the model is validated with a second set of experimental results. To speed up the calculations for the calibration, the numerical model is replaced by a surrogate model based on Polynomial Chaos Expansion and Principal Component Analysis.


Author(s):  
Maria J.S. Lima ◽  
Fernando E.S. Silva ◽  
Maria V.M. Souto ◽  
Roberta A.C. Menezes ◽  
Marcello Filgueira ◽  
...  

2017 ◽  
Vol 209 ◽  
pp. 23-26 ◽  
Author(s):  
Yu Zhang ◽  
Jianhua Tian ◽  
Kejian Jiang ◽  
Jinhua Huang ◽  
Huijia Wang ◽  
...  

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