Reproducibility of Properties of SnOxThin Films Prepared by Reactive Sputtering

ElectroComponent Science and Technology ◽

10.1155/apec.11.271 ◽

1985 ◽

Vol 11 (4) ◽

pp. 271-280 ◽

Author(s):

Grazyna Beensh-Marchwicka ◽

Lubomila Krol-Stepniewska

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Oxygen Content ◽

Tin Dioxide ◽

Reactive Sputtering ◽

Argon Atmosphere ◽

Electrical And Optical Properties

The preparation of tin dioxide films by low energy reactive sputtering of tin and tin-antimony (1-10% wt. Sb) in an oxygen – argon atmosphere is described. The dependences of oxygen content in the range from 0 to 50%, target compositions, substrate temperature of 300 K-573 K on minimum resistivity at satisfactory transmittance and on reproducibility are discussed. The correlation between the electrical and optical properties and the microstructure of the films is shown.

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The effects of oxygen content on electrical and optical properties of indium tin oxide films fabricated by reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(96)08614-2 ◽

1996 ◽

Vol 281-282 ◽

pp. 206-208 ◽

Author(s):

Shinich Honda ◽

Michio Watamori ◽

Kenjiro Oura

Keyword(s):

Optical Properties ◽

Oxygen Content ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Formation of Tin Dioxide Thin Films Using Chemical Spray Techniques: The Importance of the Substrate Temperature for Enhancing the Electrical and Optical Properties

Journal of Nanoelectronics and Optoelectronics ◽

10.1166/jno.2017.2038 ◽

2017 ◽

Vol 12 (5) ◽

pp. 425-429

Author(s):

Luis Casta�eda ◽

Erick Vel�zquez Lozada

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Tin Dioxide ◽

Electrical And Optical Properties ◽

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Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1368836 ◽

2001 ◽

Vol 19 (3) ◽

pp. 963-970 ◽

Author(s):

M. Chen ◽

Z. L. Pei ◽

X. Wang ◽

C. Sun ◽

L. S. Wen

Keyword(s):

Optical Properties ◽

Transparent Conductive Oxide ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

Conductive Oxide ◽

Dc Magnetron Reactive Sputtering

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Electrical and optical properties of nanostructured VOX thin films prepared by direct current magnetron reactive sputtering and post-annealing in oxygen

Thin Solid Films ◽

10.1016/j.tsf.2011.03.003 ◽

2011 ◽

Vol 519 (19) ◽

pp. 6203-6207 ◽

Author(s):

Zhenfei Luo ◽

Zhiming Wu ◽

Xiangdong Xu ◽

Tao Wang ◽

Yadong Jiang

Keyword(s):

Optical Properties ◽

Direct Current ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

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The effects of zinc diffusion on the electrical and optical properties of ZnO:Al films prepared by r.f. reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(91)90004-h ◽

1991 ◽

Vol 199 (2) ◽

pp. 223-230 ◽

Author(s):

Yasuhiro Igasaki ◽

Hiromi Saito

Keyword(s):

Optical Properties ◽

Reactive Sputtering ◽

Electrical And Optical Properties ◽

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Study of substrate temperature and copper doping effects on structural, electrical and optical properties of Cu-doped and undoped ZnO thin films

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-016-4771-3 ◽

2016 ◽

Vol 27 (8) ◽

pp. 7822-7828 ◽

Author(s):

Peipei Zhou ◽

Haonan Liu ◽

Linao Zhang ◽

Xiaoxia Suo ◽

Zhongshuai Liang ◽

...

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Copper Doping ◽

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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The effect of substrate temperature on the microstructural, electrical and optical properties of Sn-doped indium oxide thin films

The European Physical Journal Applied Physics ◽

10.1051/epjap/2015150004 ◽

2015 ◽

Vol 70 (3) ◽

pp. 30302 ◽

Author(s):

Davood Raoufi ◽

Atefeh Taherniya

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Indium Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Effects of hydrogen and substrate temperature on the chemical bonding and optical properties of germanium carbon films deposited by reactive sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2012.02.134 ◽

2012 ◽

Vol 258 (17) ◽

pp. 6212-6216 ◽

Author(s):

Xing-Sen Che ◽

Zheng-Tang Liu ◽

Yang-Ping Li ◽

Ning Wang

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Chemical Bonding ◽

Reactive Sputtering ◽

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Dependence of electrical and optical properties of ZnO films on substrate temperature

Materials Science in Semiconductor Processing ◽

10.1016/s1369-8001(02)00029-x ◽

2001 ◽

Vol 4 (6) ◽

pp. 617-620 ◽

Author(s):

X.L. Xu ◽

S.P. Lau ◽

J.S. Chen ◽

Z. Sun ◽

B.K. Tay ◽

...

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Zno Films ◽

Electrical And Optical Properties

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