Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
...  
Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

2018 ◽  
Vol 25 (9) ◽  
pp. 093501
Author(s):  
Wen-Zhu Jia ◽  
Rui-Qiang Liu ◽  
Xi-Feng Wang ◽  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge

2007 ◽  
pp. 327-330
Author(s):  
Su Jin Yoo ◽  
O Dae Kwon ◽  
Hee Hwan Choe ◽  
Jae Hong Jeon ◽  
Kang Woong Lee ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

2011 ◽  
Vol 39 (11) ◽  
pp. 2526-2527 ◽  
Author(s):  
Zhigang Chen ◽  
Jason Kenney ◽  
Shahid Rauf ◽  
Ken Collins ◽  
Tom Tanaka ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Large Area ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-Dimensional Fluid Simulation of Capacitively Coupled RF Electronegative Plasmas

1997 ◽  
Vol 36 (Part 1, No. 5A) ◽  
pp. 2874-2882 ◽  
Author(s):  
Tae Hun Chung ◽  
Lin Meng ◽  
Hyun Jin Yoon ◽  
Jae Koo Lee
Keyword(s):  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Electronegative Plasmas
Sign in / Sign up

Export Citation Format

Share Document