The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

1997 ◽  
Vol 30 (12) ◽  
pp. 1783-1789 ◽  
Author(s):  
T Kitajima ◽  
M Izawa ◽  
N Nakano ◽  
T Makabe
Keyword(s):  
Two Dimensional ◽  
Time Resolved ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
...  
Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

2018 ◽  
Vol 25 (9) ◽  
pp. 093501
Author(s):  
Wen-Zhu Jia ◽  
Rui-Qiang Liu ◽  
Xi-Feng Wang ◽  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor

1997 ◽  
Vol 36 (Part 1, No. 6A) ◽  
pp. 3707-3713 ◽  
Author(s):  
Ryu-ichi Hashido ◽  
Masao Hasebe ◽  
Yoshiyuki Hosokawa ◽  
Nobuhiko Nakano ◽  
Yukio Yamaguchi ◽  
...  
Keyword(s):  
Plasma Reactor ◽  
Submicron Particles ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar

1998 ◽  
Vol 84 (11) ◽  
pp. 5928-5936 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
N. Nakano ◽  
T. Makabe
Keyword(s):  
Dimensional Structure ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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