Diagnostics and modelling of hollow cathode arc plasma used for deposition of metal–carbon films
Keyword(s):
1998 ◽
Vol 13
(11)
◽
pp. 3114-3121
◽
1999 ◽
Vol 60
(1)
◽
pp. 44-49
◽
2021 ◽
Vol 2064
(1)
◽
pp. 012046
Keyword(s):
2013 ◽
Vol 223
◽
pp. 17-23
◽
2003 ◽
Vol 123
(1)
◽
pp. 35-42
◽
Keyword(s):
2011 ◽
Vol 205
◽
pp. S393-S396
◽
Keyword(s):
1987 ◽
Vol 29
(11)
◽
pp. 1615-1630
◽
Keyword(s):
2012 ◽
Vol 212
◽
pp. 67-71
◽