TEM investigation of thin oxides in MOS structures

Author(s):  
P Pongratz ◽  
H Oppolzer ◽  
D Schmitt-Landsiedel ◽  
K Hofmann ◽  
G Dorda ◽  
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1997 ◽  
Vol 50 (5) ◽  
pp. 429-433
Author(s):  
Masahito Yoshikawa ◽  
Kazunari Saitoh ◽  
Takeshi Ohshima ◽  
Hisayoshi Itoh ◽  
Isamu Nashiyama ◽  
...  
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1984 ◽  
Vol 50 (3) ◽  
pp. 273-277 ◽  
Author(s):  
V.T. Dolgopolov ◽  
S.I. Dorozhkin ◽  
A.A. Shashkin
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2008 ◽  
Vol 113 ◽  
pp. 012034 ◽  
Author(s):  
N Nedev ◽  
D Nesheva ◽  
E Manolov ◽  
R Brüggemann ◽  
S Meier ◽  
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1985 ◽  
Vol 28 (7) ◽  
pp. 717-720 ◽  
Author(s):  
Y. Nissan-Cohen ◽  
J. Shappir ◽  
D. Frohman-Bentchkowsky

2000 ◽  
Vol 114 (1) ◽  
pp. 33-37 ◽  
Author(s):  
Z Gaburro ◽  
G Pucker ◽  
P Bellutti ◽  
L Pavesi
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