A131 Nano-scale sputtering behavior in Focused Ion Beam Processing via Large-Scale Molecular Dynamics Simulation
2006 ◽
Vol 2006
(0)
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pp. 17-18
Keyword(s):
Ion Beam
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2008 ◽
Vol 106
◽
pp. 012013
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2003 ◽
Vol 51
(13)
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pp. 3885-3893
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1999 ◽
Vol 1
(23)
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pp. 5277-5290
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Keyword(s):
2016 ◽
Vol 18
(26)
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pp. 17461-17469
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2008 ◽
Vol 56
(5)
◽
pp. 1955-1988
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2002 ◽
Vol 19
(8)
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pp. 1144-1147
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Keyword(s):
Keyword(s):
2019 ◽
Vol 241
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pp. 80-91
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