In intense-light systems, the traditional discrete optical components lead to high complexity and high cost. Metasurfaces, which have received increasing attention due to the ability to locally manipulate the amplitude, phase, and polarization of light, are promising for addressing this issue. In the study, a metasurface-based reflective deflector is investigated which is composed of silicon nanohole arrays that confine the strongest electric field in the air zone. Subsequently, the in-air electric field does not interact with the silicon material directly, attenuating the optothermal effect that causes laser damage. The highest reflectance of nanoholes can be above 99% while the strongest electric fields are tuned into the air zone. One presentative deflector is designed based on these nanoholes with in-air-hole field confinement and anti-damage potential. The 1st order of the meta-deflector has the highest reflectance of 55.74%, and the reflectance sum of all the orders of the meta-deflector is 92.38%. The optothermal simulations show that the meta-deflector can theoretically handle a maximum laser density of 0.24 W/µm2. The study provides an approach to improving the anti-damage property of the reflective phase-control metasurfaces for intense-light systems, which can be exploited in many applications, such as laser scalpels, laser cutting devices, etc.
Meta-Deflectors Made of Dielectric Nanohole Arrays with Anti-Damage Potential