Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching

2019 ◽  
Vol 58 (19) ◽  
pp. 5240 ◽  
Author(s):  
Aoto Fukushima ◽  
Maiko Fujitani ◽  
Kumi Ishikawa ◽  
Masaki Numazawa ◽  
Daiki Ishi ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Reactive Ion Etching ◽  
Mechanical Polishing ◽  
Polishing Process ◽  
Ion Etching ◽  
Ray Optics ◽  
Deep Reactive Ion Etching ◽  
X Ray ◽  
Chemical Mechanical Polishing Process

X-ray optics fabricated by deep reactive ion etching (invited)

2002 ◽  
Vol 73 (3) ◽  
pp. 1464-1468 ◽  
Author(s):  
K. D. Finkelstein ◽  
Sami Rosenblatt ◽  
Paul Cottle
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Ray Optics ◽  
Deep Reactive Ion Etching ◽  
X Ray

Ultrafiltration based on various polymeric membranes for recovery of spent tungsten slurry for reuse in chemical mechanical polishing process

2018 ◽  
Vol 548 ◽  
pp. 232-238 ◽  
Author(s):  
Nur Fatin Amalina Muhammad Sanusi ◽  
Mohd Hizami Mohd Yusoff ◽  
Ooi Boon Seng ◽  
Mohd Sabirin Marzuki ◽  
Ahmad Zuhairi Abdullah
Keyword(s):  
Chemical Mechanical Polishing ◽  
Polymeric Membranes ◽  
Mechanical Polishing ◽  
Polishing Process ◽  
Chemical Mechanical Polishing Process
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