ALD/PVD – Hybrid Coating for Antireflection of 3D Surfaces

2021 ◽  
Author(s):  
Ulrike Schulz ◽  
Keyword(s):  
2003 ◽  
Vol 766 ◽  
Author(s):  
Vineet Sharma ◽  
Arief B. Suriadi ◽  
Frank Berauer ◽  
Laurie S. Mittelstadt

AbstractNormal photolithography tools have focal depth limitations and are unable to meet the expectations of high resolution photolithography on highly topographic structures. This paper shows a cost effective and promising technique of combining two different approaches to achieve critical dimensions of traces on slope pattern continuity on highly topographic structures. Electrophoretically deposited photoresist is used on 3-D structured wafers. This photoresist coating technique is fairly known in the MEMS industries to achieve uniform and conformal photoresist films on 3D surfaces. Multi step exposures are used to expose electrophoretically deposited photoresist. AlCu (Cu-0.5%), 0.47-0.53 μm thick metal film is deposited on 3D structured silicon substrate to plate photoresist. By combining these two novel methods, metal (AlCu) traces of 75 μm line width and 150 μm pitch (from top flat to down the slope) have been demonstrated on isotropically etched 350 μm deep trenches with 5-10% line width loss.


2018 ◽  
Vol 461 ◽  
pp. 171-174 ◽  
Author(s):  
Ivana Lettrichova ◽  
Agata Laurencikova ◽  
Dusan Pudis ◽  
Jozef Novak ◽  
Matej Goraus ◽  
...  

2021 ◽  
Vol 413 (8) ◽  
pp. 2125-2134
Author(s):  
Domenic Dreisbach ◽  
Georg Petschenka ◽  
Bernhard Spengler ◽  
Dhaka R. Bhandari

AbstractMass spectrometry–based imaging (MSI) has emerged as a promising method for spatial metabolomics in plant science. Several ionisation techniques have shown great potential for the spatially resolved analysis of metabolites in plant tissue. However, limitations in technology and methodology limited the molecular information for irregular 3D surfaces with resolutions on the micrometre scale. Here, we used atmospheric-pressure 3D-surface matrix-assisted laser desorption/ionisation mass spectrometry imaging (3D-surface MALDI MSI) to investigate plant chemical defence at the topographic molecular level for the model system Asclepias curassavica. Upon mechanical damage (simulating herbivore attacks) of native A. curassavica leaves, the surface of the leaves varies up to 700 μm, and cardiac glycosides (cardenolides) and other defence metabolites were exclusively detected in damaged leaf tissue but not in different regions of the same leaf. Our results indicated an increased latex flow rate towards the point of damage leading to an accumulation of defence substances in the affected area. While the concentration of cardiac glycosides showed no differences between 10 and 300 min after wounding, cardiac glycosides decreased after 24 h. The employed autofocusing AP-SMALDI MSI system provides a significant technological advancement for the visualisation of individual molecule species on irregular 3D surfaces such as native plant leaves. Our study demonstrates the enormous potential of this method in the field of plant science including primary metabolism and molecular mechanisms of plant responses to abiotic and biotic stress and symbiotic relationships. Graphical abstract


ACS Omega ◽  
2020 ◽  
Vol 5 (18) ◽  
pp. 10315-10326 ◽  
Author(s):  
Mhd. Abd. Cader Mhd. Haniffa ◽  
Hazlee Azil Illias ◽  
Ching Yern Chee ◽  
Shaliza Ibrahim ◽  
Viorel Sandu ◽  
...  

1998 ◽  
Vol 519 ◽  
Author(s):  
Y. Yan ◽  
Z. Duan ◽  
D.-G. Chen ◽  
S. Ray Chaudhuri

AbstractThe insoluble, strongly hydrogen bonded organic pigment of 3,6-bis-(4-chlorphenyl)-l,4- diketopyrrolo [3,4-c] pyrrole was transiently blocked by adding carbamate groups, and consequently incorporated into organic-inorganic hybrid matrices by a sol-gel process. The homo- (pigment-pigment) and hetero-intermolecular (pigment-matrix) interactions were found to control both the assembly and dispersion of pigment molecules in the hybrid coating films. A weaker interaction between matrices and pigment molecules results in aggregation of the carbamate pigment in the methyl-silicate films. A stronger interaction forms a homogenous dispersion and coloration of the phenyl-silicate films. The as-prepared methyl- and phenylsilicate films doped with the organic pigment were distinguished by a morphology change and a blue (hypsochromic) shift in absorption from 550 to 460 nm. Thermal treatment can remove the carbamate groups and in-situ form the organic pigment in the hybrid films.


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