Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon: A Wafer Level Testing Approach
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1992 ◽
Vol 50
(1)
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pp. 186-187
1989 ◽
Vol 47
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pp. 562-563
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1989 ◽
Vol 47
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pp. 556-557
1994 ◽
Vol 52
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pp. 646-647
2010 ◽
Vol 41
(2)
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pp. 89-107
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2015 ◽
Vol 53
(10)
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pp. 700-710
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