Optical and electrical properties of transparent conducting In2O3–ZrO2 films
2000 ◽
Vol 15
(1)
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pp. 21-24
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Keyword(s):
The optical transparencies and electrical conductivities of thin films of In2O3 mixed with ZrO2 have been investigated. These films were deposited on glass substrates at room temperature using pulsed-laser deposition. Indium–zirconium oxide films with a ZrO2 content up to a 15 wt% were conducting and more than 80% transparent from 450 to 700 nm. As the ZrO2 content increased from 0 to 15 wt%, the electrical resistivities increased from 1.28 × 10−3 to 6.48 × 10−2 Ω cm, the carrier densities were decreased from 2.14 × 1020 to 1.0 × 1018/cm3, and the Hall mobilities decreased from 21 to 5 cm2 V−1 s−1, all monotonically.
Keyword(s):
2013 ◽
Vol 362
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pp. 247-251
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2010 ◽
Vol 75
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pp. 202-207
2004 ◽
Vol 36
(4-6)
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pp. 403-408
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Keyword(s):
2003 ◽
Vol 36
(13)
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pp. 1605-1608
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2000 ◽
Vol 15
(10)
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pp. 2249-2265
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Keyword(s):
Keyword(s):