Preparation of ZnO by a nearby vaporizing chemical vapor deposition method
2003 ◽
Vol 18
(9)
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pp. 2029-2032
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Keyword(s):
Zinc oxide (ZnO) films were prepared by a nearby vaporizing chemical vapor deposition method using bis(2,4-pentanedionato)zinc as a source material. The deposition rate increased exponentially from 0.58 to 147 nm min−1 with increasing substrate temperature (Ts). The highest preferred orientation to the c axis was obtained under the conditions that the distance between substrate and source surface was 5.0 mm, and the Ts was 300 °C. When we used a sapphire (0001) substrate, an epitaxial ZnO film could be deposited on this condition.
2008 ◽
Vol 5
(9)
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pp. 3138-3140
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1994 ◽
Vol 77
(2)
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pp. 505-508
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2012 ◽
Vol 27
(1)
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pp. 33-37
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