High Energy Focused Ion Beam Nanoprobes: Design and Applications

2005 ◽  
Vol 908 ◽  
Author(s):  
Gary A. Glass ◽  
Bibhudutta Rout ◽  
Alexander D. Dymnikov ◽  
Elia V. Eschenazi ◽  
Richard Greco ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Complete System ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
System Technology ◽  
Independent Research ◽  
Coordinated Development ◽  
Component Systems ◽  
Research Facilities

AbstractAn overview of the present state of high energy focused ion beam (HEFIB) system technology, nanoprobe system design and specific ion beam writing applications will be presented. In particular, the combination of P-beam, heavy-ion writing and ion implantation to produce microstructures in resists and silicon will be demonstrated.Heretofore, the development of HEFIB technology worldwide has progressed through a series of developments at independent research facilities, each having relatively narrow and mostly isolated, research purposes. However, a complete, versatile HEFIB nanoprobe system capable of both analysis and modification will require the combination of several component systems, each with specialized technology, and significant advances in the design of a complete system can only be expected from an effort that includes a coordinated development of the component parts.

Electron and ion irradiation-induced dissolution of mechanical twins in the intermetalic U3Si: An in situ HVEM study

1989 ◽  
Vol 47 ◽  
pp. 652-653
Author(s):  
Charles W. Allen ◽  
Robert C. Birtcher
Keyword(s):  
Elevated Temperatures ◽  
Ion Irradiation ◽  
Ion Beam ◽  
National Laboratory ◽  
Argonne National Laboratory ◽  
Heavy Ion ◽  
High Energy ◽  
Mechanical Twinning ◽  
In Situ Experiments

The uranium silicides, including U3Si, are under study as candidate low enrichment nuclear fuels. Ion beam simulations of the in-reactor behavior of such materials are performed because a similar damage structure can be produced in hours by energetic heavy ions which requires years in actual reactor tests. This contribution treats one aspect of the microstructural behavior of U3Si under high energy electron irradiation and low dose energetic heavy ion irradiation and is based on in situ experiments, performed at the HVEM-Tandem User Facility at Argonne National Laboratory. This Facility interfaces a 2 MV Tandem ion accelerator and a 0.6 MV ion implanter to a 1.2 MeV AEI high voltage electron microscope, which allows a wide variety of in situ ion beam experiments to be performed with simultaneous irradiation and electron microscopy or diffraction.At elevated temperatures, U3Si exhibits the ordered AuCu3 structure. On cooling below 1058 K, the intermetallic transforms, evidently martensitically, to a body-centered tetragonal structure (alternatively, the structure may be described as face-centered tetragonal, which would be fcc except for a 1 pet tetragonal distortion). Mechanical twinning accompanies the transformation; however, diferences between electron diffraction patterns from twinned and non-twinned martensite plates could not be distinguished.

Analysis of Voltage Contrast in Secondary Electron Images Using a High-Energy Electron Spectrometer

2019 ◽  
Author(s):  
Natsuko Asano ◽  
Shunsuke Asahina ◽  
Natasha Erdman
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Sample Surface ◽  
High Energy ◽  
Secondary Electrons ◽  
Analysis Technique ◽  
Quantitative Understanding ◽  
Voltage Contrast ◽  
Acceleration Voltage ◽  
Failure Localization

Abstract Voltage contrast (VC) observation using a scanning electron microscope (SEM) or a focused ion beam (FIB) is a common failure analysis technique for semiconductor devices.[1] The VC information allows understanding of failure localization issues. In general, VC images are acquired using secondary electrons (SEs) from a sample surface at an acceleration voltage of 0.8–2.0 kV in SEM. In this study, we aimed to find an optimized electron energy range for VC acquisition using Auger electron spectroscopy (AES) for quantitative understanding.

Ion Beam Imaging Methodology of Invisible Metal under Insulator Using High Energy Electron Beam Charging

2007 ◽  
Author(s):  
C.H. Wang ◽  
S.P. Chang ◽  
C.F. Chang ◽  
J.Y. Chiou
Keyword(s):  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Measurement ◽  
High Energy ◽  
Advanced Technology ◽  
High Energy Electron ◽  
Common Assumption ◽  
Dual Beam ◽  
Imaging Methodology

Abstract Focused ion beam (FIB) is a popular tool for physical failure analysis (FA), especially for circuit repair. FIB is especially useful on advanced technology where the FIB is used to modify the circuit for new layout verification or electrical measurement. The samples are prepared till inter-metal dielectric (IMD), then a hole is dug or a metal is deposited or oxide is deposited by FIB. A common assumption is made that metal under oxide can not be seen by FIB. But a metal ion image is desired for further action. Dual beam, FIB and Scanning Electron Microscope (SEM), tools have a special advantage. When switching back and forth from SEM to FIB the observation has been made that the metal lines can be imaged. The details of this technique will be discussed below.

scholarly journals High energy density physics research at IMP, Lanzhou, China

2014 ◽  
Vol 2 ◽  
Author(s):  
Yongtao Zhao ◽  
Rui Cheng ◽  
Yuyu Wang ◽  
Xianming Zhou ◽  
Yu Lei ◽  
...  
Keyword(s):  
Energy Density ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
High Energy Density ◽  
Accelerator Facility ◽  
High Energy Density Physics ◽  
Research Activities ◽  
Modern Physics ◽  
Heavy Ion Beam

Abstract Recent research activities relevant to high energy density physics (HEDP) driven by the heavy ion beam at the Institute of Modern Physics, Chinese Academy of Sciences are presented. Radiography of static objects with the fast extracted high energy carbon ion beam from the Cooling Storage Ring is discussed. Investigation of the low energy heavy ion beam and plasma interaction is reported. With HEDP research as one of the main goals, the project HIAF (High Intensity heavy-ion Accelerator Facility), proposed by the Institute of Modern Physics as the 12th five-year-plan of China, is introduced.

Development of long-lived thick carbon stripper foils for high energy heavy ion accelerators by a heavy ion beam sputtering method

2013 ◽  
Author(s):  
Hideshi Muto ◽  
Yukimitsu Ohshiro ◽  
Katsunori Kawasaki ◽  
Michihiro Oyaizu ◽  
Toshiyuki Hattori
Keyword(s):  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Heavy Ion Beam ◽  
Carbon Stripper Foils

scholarly journals Design, development, and testing of non-intercepting profile diagnostics for intense heavy ion beams using a capacitive pickup and beam induced gas fluorescence monitors

2006 ◽  
Vol 24 (4) ◽  
pp. 541-551 ◽  
Author(s):  
F. BECKER ◽  
A. HUG ◽  
P. FORCK ◽  
M. KULISH ◽  
P. NI ◽  
...  
Keyword(s):  
Focal Plane ◽  
Energy Deposition ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
Ion Beams ◽  
High Energy Density ◽  
Design Development ◽  
Heavy Ion Beam ◽  
Beam Parameters

An intense and focused heavy ion beam is a suitable tool to generate high energy density in matter. To compare results with simulations it is essential to know beam parameters as intensity, longitudinal, and transversal profile at the focal plane. Since the beam's energy deposition will melt and evaporate even tungsten, non-intercepting diagnostics are required. Therefore a capacitive pickup with high resolution in both time and space was designed, built and tested at the high temperature experimental area at GSI. Additionally a beam induced fluorescence monitor was investigated for the synchrotron's (SIS-18) energy-regime (60–750 AMeV) and successfully tested in a beam-transfer-line.

High energy heavy ion beam lithography in silicon

2007 ◽  
Vol 261 (1-2) ◽  
pp. 731-735 ◽  
Author(s):  
Bibhudutta Rout ◽  
Alexander D. Dymnikov ◽  
Daniel P. Zachry ◽  
Elia V. Eschenazi ◽  
Yongqiang Q. Wang ◽  
...  
Keyword(s):  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
Ion Beam Lithography ◽  
Heavy Ion Beam

scholarly journals External beam for the Heavy Ion Accelerator Facility

2020 ◽  
Vol 232 ◽  
pp. 01005
Author(s):  
S. Shaharuddin ◽  
J. Stuchbery ◽  
E. C. Simpson ◽  
Z. K. Gan ◽  
A. C. Green ◽  
...  
Keyword(s):  
Systems Engineering ◽  
Biological Effects ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
External Beam ◽  
Accelerator Facility ◽  
Heavy Ion Accelerator ◽  
Beam Design ◽  
Ion Accelerator

Radiotherapy using protons and heavier ions is emerging as an alternative to traditional photon radiotherapy for cancer treatment. Ions have a depth-dose profile that results in high energy deposition at the end of the particle’s path, with a relatively low dosage elsewhere. However, the specifics of ion interactions with cellular biology are not yet fully understood. To study the induced biological effects of the ions on cell cultures, an external beam is required as biological specimens cannot be placed in vacuum. The Heavy Ion Accelerator Facility (HIAF) at the Australian National University hosts accelerators for a wide variety of ion-beam research applications. However, HIAF does not currently have an external beam capability. Here, we present an initial design for a radiobiological research capability at HIAF. A systems engineering approach was used to develop the architecture of the apparatus and determine the feasibility of adapting the current facilities to external beam applications. This effort included ion optics calculations, coupled to a Geant4 simulation, to characterise ion beam transitions through a thin window into the air. The beam spread, intensity distributions, and energy of proton and carbon ions were studied as a function of distance travelled from the window, as well as the effects of alternative window materials and thicknesses. It was determined that the proposed line at the HIAF would be suitable for the desired applications. Overall, this feasibility study lays the foundations of an external beam design, a simulation test framework, and the basis for a grant application for an external beam at the HIAF.

scholarly journals Trends in heavy ion interaction with plasma

2012 ◽  
Vol 30 (4) ◽  
pp. 679-706 ◽  
Author(s):  
Yongtao Zhao ◽  
Zhanghu Hu ◽  
Rui Cheng ◽  
Yuyu Wang ◽  
Haibo Peng ◽  
...  
Keyword(s):  
Energy Deposition ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
Highly Charged Ions ◽  
Plasma Interaction ◽  
Current Trends ◽  
Beam Plasma ◽  
Charged Ions ◽  
Review Current

AbstractIn this work, we review current trends in China to investigate beam plasma interaction phenomena. Recent progresses in China on low energy heavy ions and plasma interaction, ion beam-plasma interactions under the influences of magnetic fields, high energy heavy ion radiography through marginal range method, energy deposition of highly charged ions on surfaces and Raman spectroscopy of surfaces after irradiation of highly charged ions are presented.

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