Combined Microstructure X-Ray Optics; Multilayer Diffraction Gratings

1987 ◽  
Vol 103 ◽  
Author(s):  
Troy W. Barbee
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Diffraction Gratings ◽  
Experimental Results ◽  
Optical Elements ◽  
Ray Optics ◽  
X Ray ◽  
Spectral Ranges

ABSTRACTMultilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.

Multilayer Monochromators for the Soft X-Ray and Extreme Ultraviolet

1988 ◽  
Vol 143 ◽  
Author(s):  
Troy W. Barbee ◽  
Piero Pianetta
Keyword(s):  
Thin Films ◽  
Cross Sections ◽  
Extreme Ultraviolet ◽  
Diffraction Gratings ◽  
Multilayer Structures ◽  
Absorption Cross ◽  
Optical Elements ◽  
X Ray ◽  
Long Period ◽  
Transmission Measurements

Simple multilayer structures and multilayer diffraction gratings are now of sufficient quality to be used as optical elements in synchrotron radiation source instrumentation. In this paper results obtained with a multilayer two element monochromator will be presented. Three specific types of results will be discussed. First, transmission measurements of the absorption cross-sections of elemental thin films in the energy range 50 to 2000 eV will be presented and used to demonstrate the performance of the monochromator. Second, application of this monochromator in x-ray lithography research will be described and the advantages of the broad bandpass of multilayer optics demonstrated. Third, use of this monochromator in scattering studies of long period structures will be discussed. The potential for the use of multilayer diffraction gratings in high resolution monochromator applications will also be considered.

scholarly journals Future developments for macromolecular crystallography at the CLS

2014 ◽  
Vol 70 (a1) ◽  
pp. C1737-C1737
Author(s):  
Pawel Grochulski ◽  
Miroslaw Cygler ◽  
Michel Fodje ◽  
Shaunivan Labiuk ◽  
James Gorin ◽  
...  
Keyword(s):  
High Efficiency ◽  
Single Photon ◽  
Temporal Stability ◽  
Small Samples ◽  
X Rays ◽  
Macromolecular Crystallography ◽  
Optical Elements ◽  
X Ray ◽  
Small Crystals ◽  
Reported Data

The Canadian Macromolecular Crystallography Facility (CMCF) at the Canadian Light Source (CLS) is a suite of fully automated beamlines, 08ID-1 and 08B1-1 [1]. It serves over 60 Canadian groups plus academic and commercial users in the US. Besides remote data collection, we offer Mail-In service where data are collected by CMCF staff. Beamline 08B1-1 has been in operation since 2011 and beamline 08ID-1 since 2006. When beamline 08ID-1 was designed, over 10 years ago, small crystals were defined as having sizes of 50-100 μm. Today, the most challenging experiments require more intense X-ray beams that can be focused to accommodate much smaller crystal sizes of less than 5 μm with flux on the order of 10^11 photons/s. To reach these stringent parameters, a new more powerful source of X-rays will be required, which will be provided by a longer small-gap in-vacuum undulator (SGU). To accommodate the higher power levels and to focus X-rays to a smaller focal spot with a high degree of spatial and temporal stability, the existing X-ray optical elements need to be upgraded. The remaining components of the project include a 5-axis alignment table for improving alignment of small samples with the microbeam, a high-efficiency robotic sample-changer and a single-photon X-ray detector. Several options for the new design will be discussed. These developments are consistent with the current direction of structural biology research at the CLS [2]. Since 2006 over 225 (240) papers and 400 (444) PDB deposits reported data collected at beamline 08ID-1. Parentheses indicate the total number for the CMCF. Many of these have been published in very high impact journals such as N. Engl. J. Med., Nature, Cell, Science, PNAS, among others (http://cmcf.lightsource.ca/publications/).

Characterization of ultrafast free-electron laser pulses using extreme-ultraviolet transient gratings

2018 ◽  
Vol 25 (1) ◽  
pp. 32-38 ◽  
Author(s):  
F. Capotondi ◽  
L. Foglia ◽  
M. Kiskinova ◽  
C. Masciovecchio ◽  
R. Mincigrucci ◽  
...  
Keyword(s):  
Arrival Time ◽  
Extreme Ultraviolet ◽  
Laser Pulses ◽  
Linear Process ◽  
Third Order ◽  
X Ray ◽  
High Pulse ◽  
Spectral Ranges ◽  
Pulse Energies

The characterization of the time structure of ultrafast photon pulses in the extreme-ultraviolet (EUV) and soft X-ray spectral ranges is of high relevance for a number of scientific applications and photon diagnostics. Such measurements can be performed following different strategies and often require large setups and rather high pulse energies. Here, high-quality measurements carried out by exploiting the transient grating process,i.e.a third-order non-linear process sensitive to the time-overlap between two crossed EUV pulses, is reported. From such measurements it is possible to obtain information on both the second-order intensity autocorrelation function and on the coherence length of the pulses. It was found that the pulse energy density needed to carry out such measurements on solid state samples can be as low as a few mJ cm−2. Furthermore, the possibility to control the arrival time of the crossed pulses independently might permit the development of a number of coherent spectroscopies in the EUV and soft X-ray regime, such as, for example, photon echo and two-dimensional spectroscopy.

Fabrication and characterization of high-efficiency double-sided blazed x-ray optics

2016 ◽  
Vol 41 (2) ◽  
pp. 281 ◽  
Author(s):  
Istvan Mohacsi ◽  
Ismo Vartiainen ◽  
Manuel Guizar-Sicairos ◽  
Petri Karvinen ◽  
Vitaliy A. Guzenko ◽  
...  
Keyword(s):  
High Efficiency ◽  
Ray Optics ◽  
X Ray ◽  
Fabrication And Characterization

Alignment of the aberration-free XUV Raman spectrometer at FLASH

2019 ◽  
Vol 26 (1) ◽  
pp. 18-27 ◽  
Author(s):  
Mykola Biednov ◽  
Günter Brenner ◽  
Benjamin Dicke ◽  
Holger Weigelt ◽  
Barbara Keitel ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Laser Interferometry ◽  
Grazing Incidence ◽  
Stray Light ◽  
Optical Scheme ◽  
Optical Elements ◽  
X Ray ◽  
Raman Spectrometer ◽  
Optical Alignment

An extreme-ultraviolet (XUV) double-stage Raman spectrometer is permanently installed as an experimental end-station at the PG1 beamline of the soft X-ray/XUV free-electron laser in Hamburg, FLASH. The monochromator stages are designed according to the Czerny–Turner optical scheme, adapted for the XUV photon energy range, with optical elements installed at grazing-incidence angles. Such an optical scheme along with the usage of off-axis parabolic mirrors for light collimation and focusing allows for aberration-free spectral imaging on the optical axis. Combining the two monochromators in additive dispersion mode allows for reaching high resolution and superior stray light rejection, but puts high demands on the quality of the optical alignment. In order to align the instrument with the highest precision and to quantitatively characterize the instrument performance and thus the quality of the alignment, optical laser interferometry, Hartmann–Shack wavefront-sensing measurements as well as off-line soft X-ray measurements and extensive optical simulations were conducted. In this paper the concept of the alignment scheme and the procedure of the internal optical alignment are presented. Furthermore, results on the imaging quality and resolution of the first monochromator stage are shown.

scholarly journals Hard x-ray transmission curved crystal spectrometers (10–100 keV) for laser fusion experiments at the ShenGuang-III laser facility

2016 ◽  
Vol 4 ◽  
Author(s):  
Ming-hai Yu ◽  
Guang-yue Hu ◽  
Ning An ◽  
Feng Qian ◽  
Yu-chi Wu ◽  
...  
Keyword(s):  
Spectral Resolution ◽  
Optical Design ◽  
Experimental Results ◽  
Laser Fusion ◽  
Recording Medium ◽  
High Quality ◽  
X Ray ◽  
Laser Facility ◽  
Working Distance ◽  
Spectral Ranges

Two transmission curved crystal spectrometers are designed to measure the hard x-ray emission in the laser fusion experiment of Compton radiography of implosion target on ShenGuang-III laser facility in China. Cylindrically curved ${\it\alpha}$ -quartz (10–11) crystals with curvature radii of 150 and 300 mm are used to cover spectral ranges of 10–56 and 17–100 keV, respectively. The distance between the crystal and the x-ray source can be changed over a broad distance from 200 to 1500 mm. The optical design, including the integral reflectivity of the curved crystal, the sensitivity, and the spectral resolution of the spectrometers, is discussed. We also provide mechanic design details and experimental results using a Mo anode x-ray source. High-quality spectra were obtained. We confirmed that the spectral resolution can be improved by increasing the working distance, which is the distance between the recording medium and the Rowland circle.

scholarly journals Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

2019 ◽  
Vol 44 (20) ◽  
pp. 5104
Author(s):  
Mohammadreza Nematollahi ◽  
Philip Lucke ◽  
Muharrem Bayraktar ◽  
Andrey Yakshin ◽  
Guus Rijnders ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ray Optics ◽  
X Ray ◽  
Surface Modulation

The Use of Ti, Si, C, Be and LiF in Soft X-Ray Optics

1988 ◽  
Vol 102 ◽  
pp. 303
Author(s):  
A.V. Vinogradov
Keyword(s):  
Normal Incidence ◽  
Grazing Incidence ◽  
X Rays ◽  
Optical Elements ◽  
Ray Optics ◽  
X Ray

SummaryTi, Si, C, Be and LiF have been studied as coatings for normal incidence (multilayers) and grazing incidence (steering many-fold reflection mirrors) optical elements. The multilayers have been tested with soft (130+250 Å and hard (1.54 Å) X-rays. From these measurements the multilayer parameters have been deduced.The carbon and lithium fluorine steering mirrors showed the reflection of 10+60% for the turning angles of 30 and 45 degrees and two wavelengths of 44.7 Å and 67.6 Å. The perspectives of other materials are also discussed.

Innovative Nondestructive Compositional Mapping of Trace-Elements and Contaminants at Micron-Scale in Wafers and Packaging

2016 ◽  
Author(s):  
S.H. Lau ◽  
Wenbing Yun ◽  
Sylvia JY Lewis ◽  
Benjamin Stripe ◽  
Janos Kirz ◽  
...  
Keyword(s):  
Trace Elements ◽  
Failure Analysis ◽  
Process Monitoring ◽  
High Efficiency ◽  
Process Development ◽  
High Flux ◽  
Ray Optics ◽  
New Approach ◽  
X Ray ◽  
Analysis Process

Abstract We describe a technique for mapping the distribution and concentrations of trace elements, most notably with capabilities of achieving 1-10 parts per million sensitivities within 1 second and at <8 μm resolution. The technique features an innovative, high flux microstructured x-ray source and a new approach to x-ray optics comprising a high efficiency twin paraboloidal x-ray mirror lens. The resulting ability to acquire dramatically higher sensitivities and resolution than conventional x-ray fluorescence approaches, and at substantially higher throughput enables powerful compositional mapping for failure analysis, process development, and process monitoring.

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