Innovative Nondestructive Compositional Mapping of Trace-Elements and Contaminants at Micron-Scale in Wafers and Packaging

2016 ◽  
Author(s):  
S.H. Lau ◽  
Wenbing Yun ◽  
Sylvia JY Lewis ◽  
Benjamin Stripe ◽  
Janos Kirz ◽  
...  
Keyword(s):  
Trace Elements ◽  
Failure Analysis ◽  
Process Monitoring ◽  
High Efficiency ◽  
Process Development ◽  
High Flux ◽  
Ray Optics ◽  
New Approach ◽  
X Ray ◽  
Analysis Process

Abstract We describe a technique for mapping the distribution and concentrations of trace elements, most notably with capabilities of achieving 1-10 parts per million sensitivities within 1 second and at <8 μm resolution. The technique features an innovative, high flux microstructured x-ray source and a new approach to x-ray optics comprising a high efficiency twin paraboloidal x-ray mirror lens. The resulting ability to acquire dramatically higher sensitivities and resolution than conventional x-ray fluorescence approaches, and at substantially higher throughput enables powerful compositional mapping for failure analysis, process development, and process monitoring.

Slope-Ratio Technique for the Determination of Trace Elements by X-Ray Spectroscopy: A New Approach to Matrix Problems

1968 ◽  
Vol 22 (4) ◽  
pp. 321-324 ◽  
Author(s):  
Frank Cuttitta ◽  
Harry J. Rose
Keyword(s):  
Trace Elements ◽  
Matrix Effects ◽  
Fluorescence Analysis ◽  
Slope Ratio ◽  
New Approach ◽  
X Ray ◽  
Standard Curve ◽  
Residual Matrix ◽  
Matrix Problems

A new approach to solving matrix problems in x-ray fluorescence analysis of trace elements has been applied to the determination of bromine in saline waters and zinc in silicates. The method requires no prior knowledge of the chemical composition of the sample. Marked matrix effects are minimized by dilution, and the problem of variable backgrounds due to residual matrix effects is solved by using a slope-ratio technique. In this proposed technique, the slope of a standard curve prepared from pure solutions is compared with that of spiked samples. The ratio of the slopes of these two curves permits the calculation of an adjusted background which does not significantly differ from that of an absorbent impregnated with the sample matrix free of the element sought. Experimental parameters concerning the technique are presented. The excellent agreement of the zinc and bromine data with analytical results obtained by more conventional methods suggests that the technique can be used for the determination of other trace constituents in geologic materials. Application of the slope-ratio technique to other modes of instrumental analysis appears feasible.

Fabrication and characterization of high-efficiency double-sided blazed x-ray optics

2016 ◽  
Vol 41 (2) ◽  
pp. 281 ◽  
Author(s):  
Istvan Mohacsi ◽  
Ismo Vartiainen ◽  
Manuel Guizar-Sicairos ◽  
Petri Karvinen ◽  
Vitaliy A. Guzenko ◽  
...  
Keyword(s):  
High Efficiency ◽  
Ray Optics ◽  
X Ray ◽  
Fabrication And Characterization

A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution

2002 ◽  
Author(s):  
Steve Wang ◽  
Frederick Duewer ◽  
Shashidar Kamath ◽  
Christopher Kelly ◽  
Alan Lyon ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Integrated Circuits ◽  
Failure Analysis ◽  
Focused Ion Beam ◽  
Process Development ◽  
Imaging System ◽  
Ion Beam ◽  
Layer By Layer ◽  
X Ray ◽  
Submicron Structures

Abstract Xradia has developed a laboratory table-top transmission x-ray microscope, TXM 54-80, that uses 5.4 keV x-ray radiation to nondestructively image buried submicron structures in integrated circuits with at better than 80 nm 2D resolution. With an integrated tomographic imaging system, a series of x-ray projections through a full IC stack, which may include tens of micrometers of silicon substrate and several layers of Cu interconnects, can be collected and reconstructed to produce a 3D image of the IC structure at 100 nm resolution, thereby allowing the user to detect, localize, and characterize buried defects without having to conduct layer by layer deprocessing and inspection that are typical of conventional destructive failure analysis. In addition to being a powerful tool for both failure analysis and IC process development, the TXM may also facilitate or supplant investigations using scanning electron microscopy (SEM), transmission electron microscopy (TEM), and focused ion beam (FIB) tools, which generally require destructive sample preparation and a vacuum environment.

Nano fabrication of high efficiency stacked crystal zone plate for x-ray optics

2013 ◽  
Author(s):  
A. V. Kuyumchyan ◽  
L. A. Haroutunyan ◽  
K. G. Trouni ◽  
A. K. Truni ◽  
R. Z. Gaprelyan ◽  
...  
Keyword(s):  
High Efficiency ◽  
Zone Plate ◽  
Ray Optics ◽  
X Ray ◽  
Nano Fabrication

New Approach for Time-Resolved Reciprocal Space Mapping with Adaptive X-Ray Optics

2020 ◽  
Vol 14 (4) ◽  
pp. 756-761
Author(s):  
I. A. Eliovich ◽  
V. I. Akkuratov ◽  
A. V. Targonskii ◽  
P. A. Prosekov ◽  
A. E. Blagov ◽  
...  
Keyword(s):  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
Ray Optics ◽  
Time Resolved ◽  
New Approach ◽  
X Ray

Combined Microstructure X-Ray Optics; Multilayer Diffraction Gratings

1987 ◽  
Vol 103 ◽  
Author(s):  
Troy W. Barbee
Keyword(s):  
High Efficiency ◽  
Extreme Ultraviolet ◽  
Diffraction Gratings ◽  
Experimental Results ◽  
Optical Elements ◽  
Ray Optics ◽  
X Ray ◽  
Spectral Ranges

ABSTRACTMultilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.

scholarly journals High-efficiency diffractive x-ray optics from sectioned multilayers

2005 ◽  
Vol 86 (15) ◽  
pp. 151109 ◽  
Author(s):  
H. C. Kang ◽  
G. B. Stephenson ◽  
C. Liu ◽  
R. Conley ◽  
A. T. Macrander ◽  
...  
Keyword(s):  
High Efficiency ◽  
Ray Optics ◽  
X Ray

MicroGap Area Detector for Stress and Texture Analysis

2011 ◽  
Vol 681 ◽  
pp. 19-24
Author(s):  
Bob B. He
Keyword(s):  
Texture Analysis ◽  
High Performance ◽  
High Efficiency ◽  
X Rays ◽  
Two Dimensional ◽  
X Ray Diffraction ◽  
Large Area ◽  
Ray Optics ◽  
X Ray ◽  
Area Detector

Two-dimensional x-ray diffraction is an ideal method for examining the residual stress and texture. The most dramatic development in two-dimensional x-ray diffractometry involves three critical devices, including x-ray sources, x-ray optics and detectors. The recent development in brilliant x-rays sources and high efficiency x-ray optics provided high intensity x-ray beam with the desired size and divergence. Correspondingly, the detector used in such a high performance system requires the capability to collect large two-dimensional images with high counting rate and high resolution. This paper introduces the diffraction vector approach in two-dimensional x-ray diffraction for stress and texture analysis, and an innovative large area detector based on the MikroGap™ technology.

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