Low Energy Ion Bombardment and Microstructural Evolution in Thin Films
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ABSTRACTA new approach to modeling the evolution of islands in thin films by growth and coarsening during ion bombardment is described. Solution of a continuity equation and matter conservation relation, coupled with interface-limited and diffusion-limited rate laws for island growth and coarsening allows the kinetics of island evolution to be modeled. Results from the model indicate distinct kinetic paths for island evolution during ion bombardment as a result of growth, enhanced diffusion, island dissociation and monomer sputtering.
1989 ◽
Vol 27
(1)
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pp. 53-70
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2015 ◽
Vol 17
(12)
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pp. 7659-7669
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2013 ◽
Vol 448-453
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pp. 48-51
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1986 ◽
Vol 50
(357)
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pp. 359-373
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