Defect Structures in Heteroepitaxial InAs/GaAs and GaAs/InAs Grown by Atomic Layer Molecular Beam Epitaxy

1992 ◽  
Vol 262 ◽  
Author(s):  
S. I. Molina ◽  
G. Aragon ◽  
R. Garcia
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Defect Structures ◽  
Planar Defects ◽  
Transmission Electron

ABSTRACTA Transmission Electron Microscopy (TEM) study on ALMBE grown InAs/GaAs (001) is presented. The density and the types of defects contained in InAs and GaAs layers are clearly different. A relation between the planar defects in these layers and the compressive and extensive nature of the growth for each layer is found. Atomic Layer Molecular Beam Epitaxy (ALMBE) grown InAs layers possess a better quality of defects than other InAs layers grown on GaAs (001) by conventional MBE. Several ways of nucleation are presented as possible for explaining the existence of the different defects found in the studied heterostructure.

A Study of the Defect Structure in GaAS1−xPx/GaAs AS x<0.25

1993 ◽  
Vol 317 ◽  
Author(s):  
G. Aragon ◽  
M.J. De Castro ◽  
S.I. Molina ◽  
Y. Gonzalez ◽  
L. Gonzalez ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Molecular Beam Epitaxy ◽  
Defect Structure ◽  
Gaas Substrate ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Multiple Cracks ◽  
Transmission Electron ◽  
Phosphorous Content

ABSTRACTThe defect structure of GaAsP layer grown by Atomic Layer Molecular Beam Epitaxy on (001) GaAs substrate has been studied by Transmission Electron Microscopy. The phosphorous content and the epilayer thickness have been changed below 25% and 1μm respectively. Three kinds of defect structure have been found: a) α-δ fringes at the interface for coherent epilayer, b) Misfit dislocation for thin epilayers and c) Multiple cracks normal to the interface and parallel to one <110> direction for thick epilayers.

Vertical self-organization of Ge1−xMnx nanocolumn multilayers grown on Ge(001) substrates

2016 ◽  
Vol 30 (20) ◽  
pp. 1650269 ◽  
Author(s):  
Thi Giang Le ◽  
Minh Tuan Dau
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Molecular Beam Epitaxy ◽  
Elastic Constant ◽  
Structural Properties ◽  
Molecular Beam ◽  
Self Organization ◽  
Transmission Electron ◽  
2D Model

High-resolution transmission electron microscopy (HR-TEM) has been used to investigate the structural properties of GeMn/Ge nanocolumns multilayer samples grown on Ge(001) substrates by means of molecular beam epitaxy (MBE) system. Four bilayers with the spacer thickness in the range between 6 nm and 15 nm and 10 periods of bilayers of Ge[Formula: see text]Mn[Formula: see text]/Ge nanocolumn are presented. A simplified 2D model based on the theory of elastic constant interactions has been used to provide reasonable explanations to the vertical self-organization of GeMn nanocolumns in multilayers.

Asymmetric Cracking in Znse/ZnSxSel−x Superlattices Grown by Molecular Bean Epitaxy

1987 ◽  
Vol 102 ◽  
Author(s):  
Richard J. Dalby ◽  
John Petruzzello
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Thermal Expansion ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Lattice Mismatch ◽  
Sulfur Concentration ◽  
Transmission Electron ◽  
Theoretical Predictions ◽  
Superlattice Layer

ABSTRACTOptical and transmission electron microscopy have been used to study cracks appearing in ZnSe/ZnSxSe1−x (x ∼ 0.38) superlattices grown by Molecular Beam Epitaxy. It Is shown that when a fracture occurs it is confined, in most cases, to the superlattice and propagates along <011> cleavage directions in these <001> oriented epilayers. Cracks were not observed in all superlattices and their onset is discussed in relation to sulfur concentration, overall superlattice height, individual superlattice layer thicknesses, and stress, tensile or compressive, due to lattice mismatch and thermal expansion differences between buffer layer and superlattice. It was found that by adjusting the controllable parameters, cracks in the superlattices could be eliminated. Orientation and density of these features have been related to asynnmetric cracking associated with the zincblende structure of these II-VI materials. Experimental results are shown to be in agreement with theoretical predictions of critical heights for the onset of cracking.

Germanium Incorporation in Silicon Carbide Epitaxial Layers Using Molecular Beam Epitaxy on 4H-SiC Substrates

2019 ◽  
Vol 963 ◽  
pp. 127-130
Author(s):  
Jörg Pezoldt ◽  
Charbel Zgheib ◽  
Thomas Stauden ◽  
Gernot Ecke ◽  
Thomas Kups ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Solubility Limit ◽  
Solid Solubility Limit ◽  
Transmission Electron ◽  
Section Electron ◽  
Heteroepitaxial Layers ◽  
Section Electron Microscopy

Ternary (Si1-xCy)Gex+y solid solutions were grown on Si-face 4H-SiC applying atomic layer molecular beam epitaxy at low temperatures. The grown layers consist of twinned 3C-SiC revealed by cross section electron microscopy. The germanium was incorporated on silicon lattice sites as revealed by atomic location by channeling enhanced microanalysis transmission electron microscopy studies. The Ge concentration of the grown 3C-(Si1-xCy)Gex+y heteroepitaxial layers decreases with increasing growth temperatures, but exceeds the solid solubility limit.

Transmission electron microscopy of GaN columnar nanostructures grown by molecular beam epitaxy

2001 ◽  
Vol 43 (1) ◽  
pp. 151-156 ◽  
Author(s):  
V. V. Mamutin ◽  
N. A. Cherkashin ◽  
V. A. Vekshin ◽  
V. N. Zhmerik ◽  
S. V. Ivanov
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Transmission Electron
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