Deposition of Diamond using an Electron Cyclotron Resonance Plasma System
Keyword(s):
ABSTRACTWe have used an electron cyclotron resonance plasma system to perform chemical vapor deposition experiments on single-crystal, (110) oriented diamond substrates. The depositions were carried out at 0.060 Torr using mixtures of methanol in hydrogen. Substrate temperatures were varied from approximately 620 to 800 °C The film morphology was examined using SEM and microstructural phase determination was attempted using micro-Raman spectroscopy. Based on the results of these experiments, we have determined general trends for the characteristics of films deposited on diamond from the ECR plasma at low pressures and temperatures.
2002 ◽
Vol 235
(1-4)
◽
pp. 333-339
◽
1996 ◽
Vol 14
(3)
◽
pp. 1687
◽
1995 ◽
Vol 05
(C5)
◽
pp. C5-671-C5-677
1998 ◽
Vol 16
(3)
◽
pp. 1912-1916
◽
1997 ◽
Vol 292
(1-2)
◽
pp. 124-129
◽
1995 ◽
Vol 13
(1)
◽
pp. 118
◽
1998 ◽