Observation of the Full Interface of Multi-level Interconnects for Sub-Half-Micron Devices

1996 ◽  
Vol 446 ◽  
Author(s):  
Y. Hirose ◽  
T. Katayama ◽  
N. Fujiki ◽  
T. Ohno ◽  
M. Sekine ◽  
...  

1. AbstractIn recent years, the problem of electrical resistance of vias and contact holes has become greater because a thin insulated layer formed at the interface of the hole has become a serious difficulty in the manufacture of ULSIs. In using conventional techniques of cross sectional analysis to examine the cause, only one cross section of the hole can be analyzed, therefore there is the problem that the two-dimensional interface layer formed cannot be analyzed exactly.In this paper, we have developed a new observation method to inspect two dimensions of the layer formed locally at the interface of the holes. This new observation method gives the configuration, coverage, and element map of the interface layer because the full interface of holes can be inspected; therefore, the process margin can be discussed. The present technique is demonstrated in failure analysis of sub-half-micron vias filled with tungsten.

Author(s):  
Roozbeh (Ross) Salary ◽  
Jack P. Lombardi ◽  
Prahalad K. Rao ◽  
Mark D. Poliks

The goal of this research is online monitoring of functional electrical properties, e.g., resistance, of electronic devices made using aerosol jet printing (AJP) additive manufacturing (AM) process. In pursuit of this goal, the objective is to recover the cross-sectional profile of AJP-deposited electronic traces (called lines) through shape-from-shading (SfS) analysis of their online images. The aim is to use the SfS-derived cross-sectional profiles to predict the electrical resistance of the lines. An accurate characterization of the cross section is essential for monitoring the device resistance and other functional properties. For instance, as per Ohm’s law, the electrical resistance of a conductor is inversely proportional to its cross-sectional area (CSA). The central hypothesis is that the electrical resistance of an AJP-deposited line estimated online and in situ from its SfS-derived cross-sectional area is within 20% of its offline measurement. To test this hypothesis, silver nanoparticle lines were deposited using an Optomec AJ-300 printer at varying sheath gas flow rate (ShGFR) conditions. The four-point probes method, known as Kelvin sensing, was used to measure the resistance of the printed structures offline. Images of the lines were acquired online using a charge-coupled device (CCD) camera mounted coaxial to the deposition nozzle of the printer. To recover the cross-sectional profiles from the online images, three different SfS techniques were tested: Horn’s method, Pentland’s method, and Shah’s method. Optical profilometry was used to validate the SfS cross section estimates. Shah’s method was found to have the highest fidelity among the three SfS approaches tested. Line resistance was predicted as a function of ShGFR based on the SfS-estimates of line cross section using Shah’s method. The online SfS-derived line resistance was found to be within 20% of offline resistance measurements done using the Kelvin sensing technique.


2013 ◽  
Vol 2013 (1) ◽  
pp. 000303-000311
Author(s):  
Terence Q. Collier ◽  
Indira Gubeljic

Contaminated and corroded aluminum bond pads can lead to a number of reliability failures. Poor wirebondability, false failures at electrical probe due to high contact resistance, opens on RDL layers due to incomplete sputter, and various early life failures during JEDEC testing can all be attributed to excess oxidation and corrosion on aluminum bond pads. Understanding what layers exist on the bond pad surface is critical. Oxides, hydrates, xyfluorides and various soups of materials can be confirmed from combinations of Auger, SIMMS and FTIR but there is a chance the die can be damaged and the spot sizes can be problematic picking up information outside the bond pad target. Layer analysis of the pad can also be difficult since sputtering rates vary based on the contaminants on the pad and any thermal processing. How does one evaluate bond pads without a destructive test? Is there a process for accurate bond pad evaluation while minimizing die damage? Sure. The cycle time and costs of these tests can also be a concern particularly for a customer wanting a quick response from failure analysis. A better method is to bond the die with a gold stud bump followed by selectively etching away the gold. Etching the gold highlights the intermetallics and shows how much of the gold alloyed with aluminum versus blocked oxides. Voiding can be demonstrated, that might be misconstrued as Kirkendall voiding, by cross sectional analysis.


2019 ◽  
Vol 39 (9/10) ◽  
pp. 851-864 ◽  
Author(s):  
Luca Antonazzo

Purpose Worker-recuperated enterprises have appeared in Europe with increasing frequency since 2008, following the Great Recession that hit the western economies. The purpose of this paper is to depict the phenomenon of worker-recuperated enterprises in Italy, focusing on two different types of business recovery, that of workers buyouts and that of recovered social spaces. The paper compares these on the basis of four analytical dimensions: resilience/resistance, relationship with the market, relationship with the territory and workplace democracy. Design/methodology/approach The corpus of the research is based on the cross-sectional analysis of workers’ narratives. These were collected, within a small sample of theoretically relevant cases, in order to retrace and analyse the path from the crisis of the former companies to establishment of the workers’ cooperatives and their social and economic features. Findings The collected narratives allowed for a multi-level comparison between different types of worker-recuperated enterprises, providing some insights on their emergence, their features in terms of resilience and resistance, their relationship with the market economy and their outcomes in terms of workplace democracy and support to employment. Originality/value Worker buyouts are gaining ground in Europe as an effective mechanism to oppose the fall of the employment rate in consequence of economic crises. This research intends to offer some data and arguments to the current international debate on the effectiveness of these mechanisms in coping with economic shocks and opening up to a sustainable and cooperative work-driven economy.


1902 ◽  
Vol 70 (459-466) ◽  
pp. 491-496

The paper investigates the elastic equilibrium of a long bar of rectangular cross-section in those cases where the problem may be treated as one of two dimensions, namely:— ( a .) When the strain being in the plane of xy , the elastic solid extends indefinitely in the direction of the applied stresses over the bounding planes y = ± b , x = ± a being the same for any two sections parallel to the plane of xy . We then have a strictly two-dimensional strain.


Author(s):  
Marek Lechman

The paper presents section models for analysis of the resistance of RC members subjected to bending moment with or without axial force. To determine the section resistance the nonlinear stress-strain relationship for concrete in compression is assumed, taking into account the concrete softening. It adequately describes the behavior of RC members up to failure. For the reinforcing steel linear elastic-ideal plastic model is applied. For the ring cross-section subjected to bending with axial force the normalized resistances are derived in the analytical form by integrating the cross-sectional equilibrium equations. They are presented in the form of interaction diagrams and compared with the results obtained by testing conducted on RC columns under eccentric compression. Furthermore, the ultimate normalized bending moment has been derived for the rectangular cross-section subjected to bending without axial force. It was applied in the cross-sectional analysis of steel and concrete composite beams, named BH beams, consisting of the RC rectangular core placed inside a reversed TT welded profile. The comparisons made indicated good agreements between the proposed section models and experimental results.


Volume 3 ◽  
2004 ◽  
Author(s):  
Shinzaburo Umeda ◽  
Wen-Jei Yang

An experimental study is conducted to investigate effects of mesh-induced upstream turbulence on flip-flop flow inside diamond-shaped cylinder bundles. In order to quantitatively treat flip-flop flow induced by the self-excited oscillation of vortices, flow measurements by means of two-dimensional particle image velocimetry (PIV) and two-dimensional laser Doppler velocimetry (LDV) are employed. Flow cross-sectional area and flow rate are varied to change the Reynolds number in the bundles. A turbulence mesh is installed a very short distance upstream from the inlet of the test section. The LDV is employed to measure velocity changes in the flip-flop flow, while power spectra representing its oscillating characteristics are determined from LDV data. The dominant frequency is observed special features are disclosed in the relationship between the Reynolds number and the Strouhal number representing the dimensionless dominant frequency in all power spectra of the flip-flop flow. It is disclosed that both the flow cross section and the upstream turbulence are related to the generation of flip-flop flow in complex manner, and that the effects of the turbulence differ depending upon the flow cross section.


1975 ◽  
Vol 15 (04) ◽  
pp. 269-276 ◽  
Author(s):  
J.R. Kyte ◽  
D.W. Berry

Abstract This paper presents an improved procedure for calculating dynamic pseudo junctions that may be used in two-dimensional, areal reservoir simulations to approximate three-dimensional reservoir behavior. Comparison of one-dimensional areal and two-dimensional vertical cross-sectional results for two example problems shows that the new pseudos accurately transfer problems shows that the new pseudos accurately transfer the effects of vertical variations in reservoir properties, fluid pressures, and saturations from the properties, fluid pressures, and saturations from the cross-sectional model to the areal model. The procedure for calculating dynamic pseudo-relative permeability accounts for differences in computing block lengths between the areal and cross-sectional models. Dynamic pseudo-capillary pressure transfers the effects of pseudo-capillary pressure transfers the effects of different pressure gradients in different layers of the cross-sectional model to the areal model. Introduction Jacks et al. have published procedures for calculating dynamic pseudo-relative permeabilities fro m vertical cross-section model runs. Their procedures for calculating pseudo functions are procedures for calculating pseudo functions are more widely applicable than other published approaches. They demonstrated that, in some cases, the derived pseudo functions could be used to simulate three-dimensional reservoir behavior using two-dimensional areal simulators. For our purposes, an areal simulator is characterized by purposes, an areal simulator is characterized by having only one computing block in the vertical dimension. The objectives of this paper are to present an improved procedure for calculating dynamic pseudo functions, including a dynamic pseudo-capillary pressure, and to demonstrate that the new procedure pressure, and to demonstrate that the new procedure generally is more applicable than any of the previously published approaches. The new pseudos previously published approaches. The new pseudos are similar to those derived by jacks et al. in that they are calculated from two-dimensional, vertical cross-section runs. They differ because (1) they account for differences in computing block lengths between the cross-sectional and areal models, and (2) they transfer the effects of different flow potentials in different layers of the cross-sectional potentials in different layers of the cross-sectional model to the areal model. Differences between cross-sectional and areal model block lengths are sometimes desirable to reduce data handling and computing costs for two-dimensional, areal model runs. For very large reservoirs, even when vertical calculations are eliminated by using pseudo functions, as many as 50,000 computing blocks might be required in the two-dimensional areal model to minimize important errors caused by numerical dispersion. The new pseudos, of course, cannot control numerical pseudos, of course, cannot control numerical dispersion in the cross-sectional runs. This is done by using a sufficiently large number of computing blocks along die length of the cross-section. The new pseudos then insure that no additional dispersion will occur in the areal model, regardless of the areal computing block lengths. Using this approach, the number of computing blocks in the two-dimensional areal model is reduced by a factor equal to the square of the ratio of the block lengths for the cross-sectional and areal models. The new pseudos do not prevent some loss in areal flow-pattern definition when the number of computing blocks in the two-dimensional areal model is reduced. A study of this problem and associated errors is beyond the scope of this paper. Our experience suggests that, for very large reservoirs with flank water injection, 1,000 or 2,000 blocks provide satisfactory definition. Many more blocks provide satisfactory definition. Many more blocks might be required for large reservoirs with much more intricate areal flow patterns. The next section presents comparative results for cross-sectional and one-dimensional areal models. These results demonstrate the reliability of the new pseudo functions and illustrate their advantages pseudo functions and illustrate their advantages over previously derived pseudos for certain situations. The relationship between two-dimensional, vertical cross-sectional and one-dimensional areal reservoir simulators has been published previously and will not be repeated here in any detail. Ideally, the pseudo functions should reproduce two-dimensional, vertical cross-sectional results when they are used in the corresponding one-dimensional areal model. SPEJ P. 269


2014 ◽  
Vol 2 (42) ◽  
pp. 8976-8982 ◽  
Author(s):  
Hongxing Dong ◽  
Yang Liu ◽  
Shulin Sun ◽  
Zhanghai Chen ◽  
Long Zhang

Optical resonant modes in microwire cavities with irregular hexagonal cross-section have been observed in the visible spectral range. The effects of the cross sectional geometry on optical modulations has been directly described. Such microwires can effectively control the light field in two dimensions.


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