Spm Based Lithography for Nanometer Scale Electrodes Fabrication

1999 ◽  
Vol 584 ◽  
Author(s):  
A. Notargiacomo ◽  
E. Giovine ◽  
E. Cianci ◽  
V. Foglietti ◽  
F. Evangelisti
Keyword(s):  
Atomic Force Microscope ◽  
Material Removal ◽  
Low Cost ◽  
Metal Electrode ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Quantum Devices ◽  
Positioning Accuracy ◽  
Atomic Force ◽  
Local Oxidation

AbstractScanning probe assisted nanolithography is a very attractive technique in terms of low-cost, patterning resolution and positioning accuracy. Our approach makes use of a commercial atomic force microscope and silicon probes to build simple nanostructures, such as metal electrode pairs, for application in novel quantum devices.Sub-100 nm patterning was successfully performed using three different techniques: direct material removal, scanning probe assisted mask patterning and local oxidation.

A Study of the Photoelectric Effect Caused by a Laser Beam Used in a Beam Bounce Technique in a C-AFM System

2008 ◽  
Author(s):  
Hung-Sung Lin ◽  
Mong-Sheng Wu
Keyword(s):  
Laser Beam ◽  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Photoelectric Effect ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Electrical Characteristics ◽  
Atomic Force ◽  
Probe Microscope ◽  
Probe Head

Abstract The use of a scanning probe microscope (SPM), such as a conductive atomic force microscope (C-AFM) has been widely reported as a method of failure analysis in nanometer scale science and technology [1-6]. A beam bounce technique is usually used to enable the probe head to measure extremely small movements of the cantilever as it is moved across the surface of the sample. However, the laser beam used for a beam bounce also gives rise to the photoelectric effect while we are measuring the electrical characteristics of a device, such as a pn junction. In this paper, the photocurrent for a device caused by photon illumination was quantitatively evaluated. In addition, this paper also presents an example of an application of the C-AFM as a tool for the failure analysis of trap defects by taking advantage of the photoelectric effect.

Single Asperity Atomic Force Microscope Studies of the CMP of Silicate Glasses

2005 ◽  
Author(s):  
Stephen C. Langford ◽  
Forrest Stevens ◽  
J. Thomas Dickinson
Keyword(s):  
Atomic Force Microscope ◽  
Mechanical Stress ◽  
Material Removal ◽  
Surface Modifications ◽  
Nanometer Scale ◽  
Simultaneous Application ◽  
Single Asperity ◽  
Atomic Force ◽  
Chemical Agents ◽  
Scale Surface

The Atomic Force Microscope (AFM) allows one to examine the effects of applying highly localized stress to a surface. In the presence of solutions, tribochemical wear can be investigated. We present results of fundamental studies of the simultaneous application of chemical agents and mechanical stress involving a model single asperity and a solid surface. We show the consequences of combining highly localized mechanical stress (due to contact with the AFM tip) and exposure to aqueous solutions of known pH. The experiment simulates many features of a single particle-substrate-slurry interaction in CMP. We show that linear scans and rastered scans display significantly different material removal rates. Quantitative models are presented to explain the observed nanometer-scale surface modifications. This work complements recent observations of tip-induced wear and growth in a number of inorganic surfaces in aqueous solution.

scholarly journals Crystal Scanner for Nano-Metrology Applications

2005 ◽  
Vol 13 (2) ◽  
pp. 12-17
Author(s):  
Paul West ◽  
Zhiqiang Peng ◽  
Natalia Starostina
Keyword(s):  
Atomic Force Microscope ◽  
Surface Texture ◽  
Force Sensor ◽  
Scanning Probe ◽  
Sensor Technology ◽  
Nanometer Scale ◽  
Particle Sizes ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Probe Microscope

Traditionally a scanning probe microscope (SPM), such as the atomic force microscope (AFM), affords spectacular images of surfaces at the nanometer scale. With advanced developments in scanner design, probe manufacturing and force sensor technology it is now possible to make quantitative metrological measurements with an SPM. Quantitative metrological measurements that are possible include: a) dimensional measurements of micro/nano fabricated structures, b) surface texture of surfaces having RMS values of only a few angstroms, and c) measurements of the number of grains, and particles on a surface as well as grain and particle sizes, areas, volumes, and distributions.

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Jaqueline Stauffenberg ◽  
Ingo Ortlepp ◽  
Ulrike Blumröder ◽  
Denis Dontsov ◽  
Christoph Schäffel ◽  
...  
Keyword(s):  
Target Position ◽  
Repeated Measurements ◽  
Scanning Probe ◽  
Measuring System ◽  
Direct Drive ◽  
Positioning Accuracy ◽  
Scanning Probe Lithography ◽  
Nano Fabrication ◽  
Atomic Force ◽  
Acceleration And Deceleration

Abstract This contribution deals with the analysis of the positioning accuracy of a new Nano Fabrication Machine. This machine uses a planar direct drive system and has a positioning range up to 100 mm in diameter. The positioning accuracy was investigated in different movement scenarios, including phases of acceleration and deceleration. Also, the target position error of certain movements at different positions of the machine slider is considered. Currently, the NFM-100 is equipped with a tip-based measuring system. This Atomic Force Microscope (AFM) uses self-actuating and self-sensing microcantilevers, which can be used also for Field-Emission-Scanning-Probe-Lithography (FESPL). This process is capable of fabricating structures in the range of nanometres. In combination with the NFM-100 and its positioning range, nanostructures can be analysed and written in a macroscopic range without any tool change. However, the focus in this article is on the measurement and positioning accuracy of the tip-based measuring system in combination with the NFM-100 and is verified by repeated measurements. Finally, a linescan, realised using both systems, is shown over a long range of motion of 30 mm.

Design and Construction of Low Temperature Attachment for Commercial AFM

2013 ◽  
Vol 209 ◽  
pp. 137-142
Author(s):  
Abrarkhan M. Pathan ◽  
Dhawal H. Agrawal ◽  
Pina M. Bhatt ◽  
Hitarthi H. Patel ◽  
U.S. Joshi
Keyword(s):  
Atomic Force Microscope ◽  
Cryogenic Temperature ◽  
Low Cost ◽  
Perovskite Manganite ◽  
Atomic Force ◽  
Structure Of Nanomaterials ◽  
Negative Bending ◽  
Set Up ◽  
Free Environment ◽  
Repulsive Forces

With the rapid advancements in the field of nanoscience and nanotechnology, scanning probe microscopy has become an integral part of a typical R&D lab. Atomic force microscope (AFM) has become a familiar name in this category. The AFM measures the forces acting between a fine tip and a sample. The tip is attached to the free end of a cantilever and is brought very close to a surface. Attractive or repulsive forces resulting from interactions between the tip and the surface will cause a positive or negative bending of the cantilever. The bending is detected by means of a laser beam, which is reflected from the backside of the cantilever. Atomic force microscopy is currently applied to various environments (air, liquid, vacuum) and types of materials such as metal semiconductors, soft biological samples, conductive and non-conductive materials. With this technique size measurements or even manipulations of nano-objects may be performed. An experimental setup has been designed and built such that a commercially available Atomic Force Microscope (AFM) (Nanosurf AG, Easyscan 2) can be operated at cryogenic temperature under vacuum and in a vibration-free environment. The design also takes care of portability and flexibility of AFM i.e. it is very small, light weight and AFM can be used in both ambient and cryogenic conditions. The whole set up was assembled in-house at a fairly low cost. It is used to study the surface structure of nanomaterials. Important perovskite manganite Pr0.7Ca0.3MnO3thin films were studied and results such as morphology, RMS area and line roughness as well as the particle size have been estimated at cryogenic temperature.

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