A Study of the Photoelectric Effect Caused by a Laser Beam Used in a Beam Bounce Technique in a C-AFM System

2008 ◽  
Author(s):  
Hung-Sung Lin ◽  
Mong-Sheng Wu
Keyword(s):  
Laser Beam ◽  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Photoelectric Effect ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Electrical Characteristics ◽  
Atomic Force ◽  
Probe Microscope ◽  
Probe Head

Abstract The use of a scanning probe microscope (SPM), such as a conductive atomic force microscope (C-AFM) has been widely reported as a method of failure analysis in nanometer scale science and technology [1-6]. A beam bounce technique is usually used to enable the probe head to measure extremely small movements of the cantilever as it is moved across the surface of the sample. However, the laser beam used for a beam bounce also gives rise to the photoelectric effect while we are measuring the electrical characteristics of a device, such as a pn junction. In this paper, the photocurrent for a device caused by photon illumination was quantitatively evaluated. In addition, this paper also presents an example of an application of the C-AFM as a tool for the failure analysis of trap defects by taking advantage of the photoelectric effect.

scholarly journals Crystal Scanner for Nano-Metrology Applications

2005 ◽  
Vol 13 (2) ◽  
pp. 12-17
Author(s):  
Paul West ◽  
Zhiqiang Peng ◽  
Natalia Starostina
Keyword(s):  
Atomic Force Microscope ◽  
Surface Texture ◽  
Force Sensor ◽  
Scanning Probe ◽  
Sensor Technology ◽  
Nanometer Scale ◽  
Particle Sizes ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Probe Microscope

Traditionally a scanning probe microscope (SPM), such as the atomic force microscope (AFM), affords spectacular images of surfaces at the nanometer scale. With advanced developments in scanner design, probe manufacturing and force sensor technology it is now possible to make quantitative metrological measurements with an SPM. Quantitative metrological measurements that are possible include: a) dimensional measurements of micro/nano fabricated structures, b) surface texture of surfaces having RMS values of only a few angstroms, and c) measurements of the number of grains, and particles on a surface as well as grain and particle sizes, areas, volumes, and distributions.

Spm Based Lithography for Nanometer Scale Electrodes Fabrication

1999 ◽  
Vol 584 ◽  
Author(s):  
A. Notargiacomo ◽  
E. Giovine ◽  
E. Cianci ◽  
V. Foglietti ◽  
F. Evangelisti
Keyword(s):  
Atomic Force Microscope ◽  
Material Removal ◽  
Low Cost ◽  
Metal Electrode ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Quantum Devices ◽  
Positioning Accuracy ◽  
Atomic Force ◽  
Local Oxidation

AbstractScanning probe assisted nanolithography is a very attractive technique in terms of low-cost, patterning resolution and positioning accuracy. Our approach makes use of a commercial atomic force microscope and silicon probes to build simple nanostructures, such as metal electrode pairs, for application in novel quantum devices.Sub-100 nm patterning was successfully performed using three different techniques: direct material removal, scanning probe assisted mask patterning and local oxidation.

Characterization Complex Voltage Contrast Image Using Atomic Force Microscopy

2004 ◽  
Author(s):  
C.H. Chen ◽  
C.M. Shen ◽  
C.M. Huang ◽  
Y.F. Hsia
Keyword(s):  
Failure Analysis ◽  
Scanning Probe ◽  
Production Lines ◽  
Force Microscopy ◽  
Atomic Force ◽  
Front End ◽  
Probe Microscope ◽  
Voltage Contrast ◽  
Contrast Image ◽  
Electrical Data

Abstract The passive voltage contrast (PVC) in this experiment was widely used to detect open/short issues for most failure analyses. However, most of back-end particles were visible, but front-end particles were not. And sometimes only used PVC image, the failure mechanism was un-imaginable. As a result, we needed to collect some electrical data to explain complex PVC image, before physical failure analysis (PFA) was started. This paper shows how to use the scanning probe microscope (SPM) tool to make up PVC method and overcome the physical failure analysis challenge. From our experiment, the C-AFM could provide more information of the defect type and give faster feedback to production lines.

scholarly journals Dip Pen Nanolithography: A Desktop Nanofabrication Approach Using High-Throughput Flexible Nanopatterning

2009 ◽  
Vol 17 (2) ◽  
pp. 30-33
Author(s):  
Jason Haaheim ◽  
Omkar A. Nafday
Keyword(s):  
Atomic Force Microscope ◽  
Materials Science ◽  
Scanning Probe ◽  
Massively Parallel ◽  
Atomic Force Microscope Cantilever ◽  
Scanning Probe Lithography ◽  
Atomic Force ◽  
Probe Microscope ◽  
Thermally Actuated ◽  
Dip Pen Nanolithography

Dip Pen Nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope tip is used to transfer molecules to a surface via a solvent meniscus. This technique allows surface patterning on scales of under 100 nanometres. DPN is the nanotechnology analog of the dip pen (also called the quill pen), where the tip of an atomic force microscope cantilever acts as a “pen,” which is coated with a chemical compound or mixture acting as an “ink,” and put in contact with a substrate, the “paper.”DPN enables direct deposition of nanoscale materials onto a substrate in a flexible manner. The vehicle for deposition can include pyramidal scanning probe microscope tips, hollow tips, and even tips on thermally actuated cantilevers. Recent advances have demonstrated massively parallel patterning using two-dimensional arrays of 55,000 tips, depicted below. Applications of this technology currently range through chemistry, materials science, and the life sciences, and include such work as ultra high density biological nanoarrays, additive photomask repair, and brand protection for pharmaceuticals.

Design and Orthogonality Correction of a Planar Scanner for an Atomic Force Microscope

2006 ◽  
Vol 326-328 ◽  
pp. 401-404
Author(s):  
Dong Yeon Lee ◽  
Dae Gab Gweon
Keyword(s):  
Atomic Force Microscope ◽  
Open Loop ◽  
Scanning Probe ◽  
Total System ◽  
Random Errors ◽  
Element Analysis ◽  
Loop Control ◽  
Atomic Force ◽  
Probe Microscope ◽  
Small Feature

This paper shows a method of designing a nano-positioning planar scanner that can be used in a scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. Furthermore, we used a motion amplifying mechanism in the piezoelectric actuator to achieve a large travel range. We theoretically determined the travel range of the total system and verified the range by using a program based on a finite element analysis. The maximum travel range of the planar scanner was greater than 120 μm. A planar scanner of an atomic force microscope can move samples with a few nm resolutions. To get stable AFM images of small feature samples, a closed loop control could not be used due to large random errors of the sensor. The orthogonality of a new planar scanner having a motion guide is measured and corrected by using a simple electronic circuit in the open loop scanning to reduce the scanner artifact.

scholarly journals Microscopes aren't just for Microscopists, Anymore!

1994 ◽  
Vol 2 (5) ◽  
pp. 28-29
Author(s):  
Stephen W. Carmichael
Keyword(s):  
Laser Beam ◽  
Atomic Force Microscope ◽  
Temporal Analysis ◽  
Scanning Probe ◽  
New Family ◽  
Atomic Force ◽  
The Future ◽  
Morphologic Data ◽  
Types Of Information

Historically, microscopes have been used to gather morphologic data. We have called people who use these instruments microscopists, and it is implied that microscopists are morphologists. As was pointed out in the April/May issue of this newsletter, useful information about a specimen is also gained from temporal analysis. Further, it has been appreciated that the new family of scanning probe microscopes can be used to gather additional types of information so that these instruments have the potential to be useful beyond the dreams of a conventional microscopist. As we will discuss in this article, the future is here for one such application.The atomic force microscope (AFM) takes advantage of the leverage afforded by the deflection of a laser beam bounced off a cantilevered stylus that is scanned over the surface of a specimen.

The atomic-force microscope and its future in biology

1993 ◽  
Vol 51 ◽  
pp. 704-705
Author(s):  
Jean-Paul Revel
Keyword(s):  
Silicon Nitride ◽  
Laser Beam ◽  
Atomic Force Microscope ◽  
Scanning Tunneling Microscope ◽  
Point Of View ◽  
Scanning Tunneling ◽  
Close Relative ◽  
Tunneling Microscope ◽  
Atomic Force ◽  
Sharp Point

The last few years have been marked by a series of remarkable developments in microscopy. Perhaps the most amazing of these is the growth of microscopies which use devices where the place of the lens has been taken by probes, which record information about the sample and display it in a spatial from the point of view of the context. From the point of view of the biologist one of the most promising of these microscopies without lenses is the scanned force microscope, aka atomic force microscope.This instrument was invented by Binnig, Quate and Gerber and is a close relative of the scanning tunneling microscope. Today's AFMs consist of a cantilever which bears a sharp point at its end. Often this is a silicon nitride pyramid, but there are many variations, the object of which is to make the tip sharper. A laser beam is directed at the back of the cantilever and is reflected into a split, or quadrant photodiode.

Failure Analysis of Laser Blown Metal Fuse Failures in Submicron Technology by C-AFM

2006 ◽  
Author(s):  
Liang-Feng Wen ◽  
Chien-Hui Chen ◽  
Allen Timothy Chang
Keyword(s):  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Laser Cutting ◽  
Spot Size ◽  
Repair Rate ◽  
Atomic Force ◽  
Measurement Laser

Abstract This paper presents a method of using a conductive atomic force microscope (C-AFM) to characterize a submicron metal fuse that has been blown open inadequately by laser. In order to obtain a proper I-V curve measured using the C-AFM without affecting the incompletely opened fuse, the paper proposes a method of preserving the fuse by coating its surface with spin-on glass. The paper explains how differences in laser cutting machines resulted in the high failure repair rate of customer product despite equivalent energy and spot size settings. Analysis of the fuse bank circuitry on wafers helped to find the critical physical differences between a fully blown and a poorly blown fuse. By overcoming difficulties in preserving the blown fuse failure sites for C-AFM measurement, laser settings could be easily optimized to ensure proper fuse opening.

Быстродействующая атомно-силовая и сканирующая капиллярная микроскопия в решении задач материаловедения, биологии и медицины

2020 ◽  
Vol 13 (3-4) ◽  
pp. 222-228
Author(s):  
И.В. Яминский ◽  
А.И. Ахметова
Keyword(s):  
Antibiotic Resistance ◽  
Early Detection ◽  
Biomedical Research ◽  
Drug Screening ◽  
Targeted Delivery ◽  
High Speed ◽  
Scanning Probe ◽  
Biological Processes ◽  
Atomic Force ◽  
Probe Microscope

Разработка высокоэффективных режимов быстродействующего сканирующего зондового микроскопа, в первую очередь атомно-силовой и сканирующей капиллярной микроскопии, представляет особый интерес для успешного проведения биомедицинских исследований: изучения биологических процессов и морфологии биополимеров, определения антибио­тикорезистентности бактерий, адресной доставки биомакромолекул, скринингу лекарств, раннему обнаружению биологических агентов (вирусов и бактерий) и др. The development of highly efficient modes of a high-speed scanning probe microscope, primarily atomic force and scanning capillary microscopy, is of particular interest for successful biomedical research: studying biological processes and the morphology of biopolymers, determining antibiotic resistance of bacteria, targeted delivery of biomacromolecules, drug screening, early detection agents (viruses and bacteria), etc.

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