Micro-Raman Characterization of Unusual Defect Structure in Arsenic-Implanted Silicon

1999 ◽  
Vol 588 ◽  
Author(s):  
David D. Tuschel ◽  
James P. Lavine
Keyword(s):  
Raman Spectroscopy ◽  
Raman Spectra ◽  
Defect Structure ◽  
Optical Mode ◽  
Micro Raman Spectroscopy ◽  
Lattice Damage ◽  
Spatially Varying ◽  
Raman Characterization ◽  
Extensive Damage

AbstractRaman spectroscopy has often been used to study the damage to semiconductors induced by ion implantation. Off-axis, macro-Raman spectra reveal extensive damage to the silicon lattice, consistent with many literature reports. However, when the same samples were analyzed in the backscattering mode by micro-Raman spectroscopy, evidence was found for orientational dependent lattice damage and an unusual defect structure. P/O micro-Raman spectra reveal the spatially-varying appearance of a band between 505 and 510 cm−1 always accompanied by that of the silicon optical mode at 520 cm−1.

Micro-Raman Characterization of Arsenic-Implanted Silicon: Interpretation of the Spectra

1999 ◽  
Vol 588 ◽  
Author(s):  
James P. Lavine ◽  
David D. Tuschel
Keyword(s):  
Raman Spectroscopy ◽  
Raman Spectra ◽  
Room Temperature ◽  
Micro Raman Spectroscopy ◽  
Raman Characterization

AbstractRaman spectra were measured on arsenic-implanted silicon with micro-Raman spectroscopy in the backscattering mode and with macro-Raman spectroscopy. A peak is observed between 505 and 510 cm−1 with 488 and 514.5 nm excitation. This peak and a related peak from the substrate at about 520 cm−1 are seen in selected regions of the implanted samples when the implant dose is above 2 × 1014 As/cm2. These features may be due to a long room temperature anneal, as they are absent in recently prepared samples. Possible explanations for the features are presented.

Raman Spectra of Ion Implanted Graphite

1981 ◽  
Vol 7 ◽  
Author(s):  
B.S. Elman ◽  
H. Mazurek ◽  
M.S. Dresselhaus ◽  
G. Dresselhaus
Keyword(s):  
Raman Spectroscopy ◽  
Ion Implantation ◽  
Raman Spectra ◽  
Annealing Temperature ◽  
Annealing Process ◽  
Lattice Order ◽  
Annealing Temperatures ◽  
High Fluences ◽  
Lattice Damage ◽  
The Way

ABSTRACTRaman spectroscopy is used in a variety of ways to monitor different aspects of the lattice damage caused by ion implantation into graphite. Particular attention is given to the use of Raman spectroscopy to monitor the restoration of lattice order by the annealing process, which depends critically on the annealing temperature and on the extent of the original lattice damage. At low fluences the highly disordered region is localized in the implanted region and relatively low annealing temperatures are required, compared with the implantation at high fluences where the highly disordered region extends all the way to the surface. At high fluences, annealing temperatures comparable to those required for the graphitization of carbons are necessary to fully restore lattice order.

XRD, SEM/EDX and micro-Raman spectroscopy for mineralogical and chemical characterization of iron slags from the Roman archaeological site of Forua (Biscay, North Spain)

2018 ◽  
Vol 138 ◽  
pp. 246-254 ◽  
Author(s):  
Haizea Portillo ◽  
Maria Cruz Zuluaga ◽  
Luis Angel Ortega ◽  
Ainhoa Alonso-Olazabal ◽  
Xabier Murelaga ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Chemical Characterization ◽  
Archaeological Site ◽  
Micro Raman Spectroscopy

scholarly journals Micro-Raman Spectroscopy, a Powerful Technique Allowing Sure Identification and Complete Characterization of Asbestiform Minerals

2019 ◽  
Vol 9 (15) ◽  
pp. 3092 ◽  
Author(s):  
Caterina Rinaudo ◽  
Alessandro Croce
Keyword(s):  
Raman Spectroscopy ◽  
Crystal Surface ◽  
Complete Characterization ◽  
Mineral Phase ◽  
Asbestos Fibers ◽  
Micro Raman Spectroscopy ◽  
Fibrous Minerals ◽  
Iron Sulphate ◽  
Asbestiform Minerals

Micro-Raman spectroscopy has been applied to fibrous minerals regulated as “asbestos”—anthophyllite, actinolite, amosite, crocidolite, tremolite, and chrysotile—responsible of severe diseases affecting mainly, but not only, the respiratory system. The technique proved to be powerful in the identification of the mineral phase and in the recognition of particles of carbonaceous materials (CMs) lying on the “asbestos” fibers surface. Also, erionite, a zeolite mineral, from different outcrops has been analyzed. To erionite has been ascribed the peak of mesothelioma noticed in Cappadocia (Turkey) during the 1970s. On the fibers, micro-Raman spectroscopy allowed to recognize many grains, micrometric in size, of iron oxy-hydroxides or potassium iron sulphate, in erionite from Oregon, or particles of CMs, in erionite from North Dakota, lying on the crystal surface. Raman spectroscopy appears therefore to be the technique allowing, without preparation of the sample, a complete characterization of the minerals and of the associated phases.

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