High Quality a-Si Films and Superlattice Structure p-Layer a-Si Solar Cells
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Si Films
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ABSTRACTAs a new preparation method for high-quality a-Si films, we have developed the super chamber, a separated UHV reaction chamber system. A low impurity concentration and excellent film properties were obtained by the super chamber. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.As a new material, amorphous superlattice structure films were fabricated by the photo-CVD method for the first time. Quantization effects and low damage to the interfaces were observed. Superlattice structure p-layer a-Si solar cells were fabricated for the first time, and a conversion efficiency of 10.5% was obtained.
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1987 ◽
Vol 26
(Part 1, No. 1)
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pp. 28-32
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2017 ◽
Vol 5
(35)
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pp. 9005-9011
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2017 ◽
Vol 56
(47)
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pp. 15078-15082
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