Pulsed Laser Annealing of Silicon-Germanium Films

2002 ◽  
Vol 741 ◽  
Author(s):  
Sherif Sedky ◽  
Jeremy Schroeder ◽  
Timothy Sands ◽  
Roger Howe ◽  
Tsu-Jae King
Keyword(s):  
Surface Roughness ◽  
Silicon Germanium ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Chemical Vapor ◽  
Laser Pulses ◽  
Pulsed Laser Annealing ◽  
Pressure Chemical ◽  
Noticeable Reduction ◽  
Columnar Grain

ABSTRACTIn this work, we investigate the possibility of using pulsed laser annealing to locally tailor the physical properties of Si1-xGex (18% < × < 90%) prepared by low pressure chemical vapor deposition (LPCVD) at 400°C. Films which were amorphous as deposited showed, after laser annealing, strong {111} texture and a columnar grain microstructure and an average resistivity of 0.7 mΩ.cm. AFM showed that the first few laser pulses result in a noticeable reduction in surface roughness, which is proportional to the pulse energy. However, a large number of successive pulses dramatically increases the surface roughness.

Effect of excimer laser annealing on the structural properties of silicon germanium films

2004 ◽  
Vol 19 (12) ◽  
pp. 3503-3511 ◽  
Author(s):  
Sherif Sedky ◽  
Jeremy Schroeder ◽  
Timothy Sands ◽  
Tsu-Jae King ◽  
Roger T. Howe
Keyword(s):  
Surface Roughness ◽  
Excimer Laser ◽  
Silicon Germanium ◽  
Laser Annealing ◽  
Chemical Vapor ◽  
Laser Pulses ◽  
Film Structure ◽  
Excimer Laser Annealing ◽  
Pressure Chemical ◽  
Columnar Grain

We investigated the use of a pulsed excimer laser having a wavelength of 248 nm, a pulse duration of 38 ns, and an average fluence between 120 and 780 mJ/cm2 to locally tailor the physical properties of Si1−xGex (18% < x < 90%) films deposited by low-pressure chemical vapor deposition at temperatures between 400 and 450 °C. Amorphous as-deposited films showed, after laser annealing, strong {111} texture, a columnar grain microstructure, and an average resistivity of 0.7 mΩ cm. Atomic force microscopy indicated that the first few laser pulses resulted in a noticeable reduction in surface roughness, proportional to the pulse energy. However, a large number of successive pulses dramatically increased the surface roughness. The maximum thermal penetration depth of the laser pulse is demonstrated to depend on the fluence and the film structure being either polycrystalline or amorphous. Finally, a comparison between excimer laser annealing and metal-induced crystallization and rapid thermal annealing is presented.

Transient Conductance Measurements During Pulsed Laser Annealing

1981 ◽  
Vol 4 ◽  
Author(s):  
M. O. Thompson ◽  
G. J. Galvin ◽  
J. W. Mayer ◽  
R. B. Hammond ◽  
N. Paulter ◽  
...  
Keyword(s):  
Single Crystal ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Interface Velocity ◽  
Laser Pulses ◽  
Molten Layer ◽  
Pulsed Laser Annealing ◽  
Complete Melting ◽  
Solid Liquid Interface ◽  
Solid Liquid

ABSTRACTMeasurements were made of the conductance of single crystal Au-doped Si and silicon-on-sapphire (SOS) during irradiation with 30 nsec ruby laser pulses. After the decay of the photoconductive response, the sample conductance is determined primarily by the thickness and conductivity of the molten layer. For the single crystal Au-doped Si, the solid-liquid interface velocity during recrystallization was determined from the current transient to be 2.5 m/sec for energy densities between 1.9 and 2.6 J/cm2, in close agreement with numerical simulations based on a thermal model of heat flow. SOS samples showed a strongly reduced photoconductive response, allowing the melt front to be observed also. For complete melting of a 0.4 μm Si layer, the regrowth velocity was 2.4 m/sec.

scholarly journals Кристаллизация плeнок аморфного германия и многослойных структур a-Ge/a-Si под действием наносекундного лазерного излучения

2019 ◽  
Vol 53 (3) ◽  
pp. 423
Author(s):  
В.А. Володин ◽  
Г.К. Кривякин ◽  
Г.Д. Ивлев ◽  
С.Л. Прокопьев ◽  
С.В. Гусакова ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Chemical Vapor ◽  
Structural Defects ◽  
Scanning Electron Microscopy Data ◽  
Phonon Confinement ◽  
Pulsed Laser Annealing ◽  
Silicon Structures ◽  
Microscopy Data ◽  
Germanium Silicon

AbstractThe processes of the crystallization of amorphous germanium films and multilayer germanium/silicon structures upon exposure to nanosecond (70 ns) ruby laser radiation (λ = 694 nm) are studied. The samples are grown on silicon and glassy substrates by plasma-enhanced chemical vapor deposition. Pulsed laser annealing of the samples is conducted in the range of pulse energy densities E _ p from 0.07 to 0.8 J cm^–2. The structure of the films after annealing is determined by analyzing the scanning electron microscopy data and Raman spectra. It is established that, after annealing, the films are completely crystallized and, in this case, contain regions of coarse crystalline grains (>100 nm), whose fraction increases, as E _ p is increased, and reaches 40% of the area. From analysis of the position of the Raman peaks, it is conceived that the crystalline grains, whose dimensions exceed 100 nm, either contain structural defects or stretching strains. The correlation length of optical vibrations is determined from the phonon confinement model and found to increase from 5 to 8 nm, as E _ p is increased. Pulsed laser annealing of multilayer Ge(10 nm)/Si(5 nm) structures induces partial intermixing of the layers with the formation of Ge–Si alloys.

Nucleation of Allotropic Phases During Pulsed Laser Annealing of Manganese

1985 ◽  
Vol 51 ◽  
Author(s):  
J. H. Perepezko ◽  
D. M. Follstaedt ◽  
P. S. Peercy
Keyword(s):  
Melting Point ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Nucleation Kinetics ◽  
Pulsed Heating ◽  
Pulsed Laser Annealing ◽  
Incident Laser Pulse ◽  
Δ Phase ◽  
Undercooled Melt

ABSTRACTManganese has four allotropes with an equilibrium melting point of the high temperature δ-phase at 1517 K and calculated metastable melting points for the ϒ, β and α phases at 1501 K, 1481 K and 1395 K, respectively. Our observations for Mn irradiated with a pulsed laser and supporting estimates of maximum allotropic transition rates indicate that transformations between allotropes are suppressed during heating with ~ 25 ns laser pulses, as well as during subsequent cooling. Upon pulsed heating of β-Mn to the melt threshold, the melt is undercooled 122 K below the δ-Mn melting point. For incident laser pulse energy densities near the melting threshold, resolidification involves regrowth of β-Mn from the substrate. At energy densities well above threshold, the ϒ-Mn phase forms by separate nucleation and growth from the undercooled melt, and is retained upon rapid solidification. From these results and analyses, we conclude that significant melt undercooling, which may exceed 100 K, can occur during pulsed laser melting of metallic crystals and that the resulting crystalline structure is determined by both thermodynamics and nucleation kinetics.

A Laser Triggered Self-Sustaining Metals-Compound Semiconductor Transition for AlSb

1981 ◽  
Vol 4 ◽  
Author(s):  
R. Andrew ◽  
L. Baufay ◽  
A. Pigeolet ◽  
L.D. Laude
Keyword(s):  
Laser Pulse ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Pulsed Laser Annealing ◽  
Short Laser Pulses ◽  
Thermally Triggered ◽  
Heat Of Transformation ◽  
Complete Transformation

ABSTRACTThe preparation of AlSb thin films by pulsed laser annealing of Al/Sb sandwiches is studied in order to resolve some past controversy about the temperature rise induced by the laser pulse. Using 1000 Ȧ thick two layer films supported by TEM grids, we investigate the energy threshold for complete transformation as a function of pulse duration from 15 nsec to 100 msec, and of ambient temperature from −100°C to 250°C.We thence calculate the temperature effect directly induced by the laser to be about 930°C, or approximately the melting point of the metals, whereas inert gas furnace anneals of comparable films show transformation at this temperature occuring only in about 100 sec. We discuss the isoenergetic nature of the system for short laser pulses and the role of the heat of transformation, and thus conclude that the reaction is thermally triggered by the laser pulse but is to some extent self-sustaining via the heat of transformation locally distributed. This model is also shown to have equal validity for the systems CdTe, CdSe and AlAs.

Time-Resolved Study of Silicon During Pulsed-Laser Annealing

1983 ◽  
Vol 13 ◽  
Author(s):  
B. C. Larson ◽  
C. W. White ◽  
T. S. Noggle ◽  
J. F. Barhorst ◽  
D. M. Mills
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
High Energy ◽  
Temperature Gradients ◽  
Time Resolved ◽  
Synchrotron Source ◽  
Near Surface ◽  
Solid Interface ◽  
Pulsed Laser Annealing

ABSTRACTNear surface temperatures and temperature gradients have been studied in silicon during pulsed laser annealing. The investigation was carried out using nanosecond resolution x-ray diffraction measurements made at the Cornell High Energy Synchrotron Source. Thermal-induced-strain analyses of these real-time, extended Bragg scattering measurements have shown that the lattice temperature reached the melting point during 15 ns, 1.1–1.5 J/cm2 ruby laser pulses and that the temperature of the liquid-solid interface remained at that temperature throughout the high reflectivity phase, after which time the surface temperature subsided rapidly. The temperature gradients below the liquid-solid interface were found to be in the range of 107°C/cm.

scholarly journals Laser Induced Defects and Materials Interactions in the V-Si System

1980 ◽  
Vol 1 ◽  
Author(s):  
B. R. Appleton ◽  
B. Stritzker ◽  
C. W. White ◽  
J. Narayan ◽  
J. Fletcher ◽  
...  
Keyword(s):  
Single Crystals ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Rapid Quenching ◽  
Ion Scattering ◽  
Ion Channeling ◽  
Pulsed Laser Annealing ◽  
Composition And Structure ◽  
Induced Defects

ABSTRACTPulsed laser annealing has been evaluated as a technique for fabricating superconducting V3 Si from multilayer V-Si samples, and the nature of laser-induced defects in V3 Si single crystals has been examined. Correlated analyses by ion scattering, ion channeling, Tc measurements and TEM were used to examine the composition and structure of samples subjected to single and multiple laser pulses. It was observed that although the superconducting A15 phase could be formed by pulsed laser mixing, the associated rapid quenching effects introduced defects which were not completely removed by thermal annealing to 925 K for 1 hour. Ion channeling and TEM studies of V3 Si single crystals showed that pulsed laser irradiation caused microcracks to develop in the surface, probably from mechanical stresses induced by thermal gradients.

Pulsed laser annealing of zinc implanted GaAs

1978 ◽  
Vol 14 (4) ◽  
pp. 85 ◽  
Author(s):  
S.S. Kular ◽  
B.J. Sealy ◽  
K.G. Stephens ◽  
D.R. Chick ◽  
Q.V. Davis ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing

Optical and electrical correlation effects in ZnO nanostructures: Role of pulsed laser annealing

2021 ◽  
Vol 115 ◽  
pp. 111028
Author(s):  
Hayder J. Al-Asedy ◽  
Shuruq A. Al-khafaji ◽  
S.K. Ghoshal
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Zno Nanostructures ◽  
Correlation Effects ◽  
Pulsed Laser Annealing

Ferroelectric Hf 0.5 Zr 0.5 O 2 Thin Films Crystallized by Pulsed Laser Annealing

2021 ◽  
Author(s):  
Natalia Volodina ◽  
Anna Dmitriyeva ◽  
Anastasia Chouprik ◽  
Elena Gatskevich ◽  
Andrei Zenkevich
Keyword(s):  
Thin Films ◽  
Laser Annealing ◽  
Pulsed Laser ◽  
Pulsed Laser Annealing
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