Effects of Supercritical CO2 Drying and Photoresist Strip on Low-k Films

2003 ◽  
Vol 766 ◽  
Author(s):  
R.F. Reidy ◽  
Zhengping Zhang ◽  
R.A. Orozco-Teran ◽  
B.P. Gorman ◽  
D.W. Mueller
Keyword(s):  
Dielectric Constant ◽  
Porous Materials ◽  
Transport Properties ◽  
Supercritical Co2 ◽  
Polar Molecule ◽  
Interlayer Dielectric ◽  
Highly Porous Materials ◽  
Supercritical Co2 Drying ◽  
Low K ◽  
Highly Porous

AbstractFuture interlayer dielectric (ILD) requirements necessitate reductions in dielectric constant to 2.1 within four years. Due to gaseous-like transport properties and near liquid-like densities, supercritical methods have been developed to dry and strip resist from these highly porous materials. Although a non-polar molecule, the solvating capability of supercritical CO2 (SCCO2) can be tailored by varying pressure, temperature, and co-solvents. This flexibility has been employed to remove photoresist and moisture from porous low-k films. The results of these experiments have been characterized using FTIR, ellipsometry, and SEM.

Formation and Propagation of Shock Waves in Highly Porous Materials

2016 ◽  
Vol 55 (3-4) ◽  
pp. 134-140
Author(s):  
M. B. Shtern ◽  
E. V. Kartuzov
Keyword(s):  
Shock Waves ◽  
Porous Materials ◽  
Highly Porous Materials ◽  
Highly Porous

A two-stage approach to the segmentation of FIB-SEM images of highly porous materials

2012 ◽  
Vol 69 ◽  
pp. 115-126 ◽  
Author(s):  
Martin Salzer ◽  
Aaron Spettl ◽  
Ole Stenzel ◽  
Jan-Henrik Smått ◽  
Mika Lindén ◽  
...  
Keyword(s):  
Porous Materials ◽  
Two Stage ◽  
Sem Images ◽  
Highly Porous Materials ◽  
Highly Porous

scholarly journals Extension of the Wu–Jing equation of state for highly porous materials: Calculations to validate and compare the thermoelectron model

2002 ◽  
Vol 92 (10) ◽  
pp. 5917-5923 ◽  
Author(s):  
Geng Huayun ◽  
Wu Qiang ◽  
Tan Hua ◽  
Cai Lingcang ◽  
Jing Fuqian
Keyword(s):  
Equation Of State ◽  
Porous Materials ◽  
Highly Porous Materials ◽  
Highly Porous

Highly porous nature of C-type asteroid 162173 Ryugu revealed by thermal imaging from Hayabusa2

2020 ◽  
Author(s):  
Tatsuaki Okada ◽  
Satoshi Tanaka ◽  
Yuri Shimaki ◽  
Naoya Sakatani ◽  
Takehiko Arai ◽  
...  
Keyword(s):  
Porous Materials ◽  
Thermal Imaging ◽  
Carbonaceous Chondrite ◽  
Thermal Inertia ◽  
Temperature Profiles ◽  
Thermal Images ◽  
Highly Porous Materials ◽  
Deep Interior ◽  
Degree Of Consolidation ◽  
Highly Porous

<p>Thermal imaging, or thermography, has revealed the surface physical state of the C-type near-Earth asteroid 162173 Ryugu (Okada et al., 2020). The asteroid is the target body of JAXA Hayabsua2 asteroid sample return mission, and it has been characterized through remote sensing and surface experiments, and will be deeply and accurately investigated by analysis of returned sample. Thermal observations are among such multi-scale observations, providing a new insight into understanding planetary evolution process.</p> <p>Thermal infrared imager TIR (Okada et al., 2017; 2020) was used to take one-rotation global thermal images of Ryugu at every 6° step, from the home position (20 km altitude) or from the Mid-Altitude (5 km altitude). There were two big surprises contrary to the predictions before arrival at Ryugu: i) flat diurnal temperature profiles compared to the case of non-rough surface, and ii) non-cold spots identified for most of boulders. The flat diurnal temperature profiles and its maximum temperature in a day indicate that Ryugu must have very rough surfaces made of highly porous materials, derived from the thermal inertia of 300 ± 100 J K<sup>-1</sup>s<sup>-0.5</sup>m<sup>-2</sup> (hereafter, tiu). Non-cold boulders indicate that boulders are less consolidated or compacted than typical carbonaceous chondrite meteorites, and shows the same thermophysical properties as the surroundings. TIR was also used to take close-up thermal images during the descent operations, and to have proven that the surface of asteroid is covered with fragments of porous rocks, larger than several centimeters in diameter. The typical size of fragments larger than thermal skin depth (~35 mm) results in similar thermal properties between the boulders and their surroundings. We also consider the surface roughness effect (Shimaki et al., 2020) to obtain the maps of thermal inertia ( 225 ± 45 tiu) and the roughness (0.41 ± 0.05) at the same time, corresponding to very rough surfaces made of highly-porous materials. This thermal inertia is basically consistent with the value (282 +93/-35 tiu) by in situ measurement using a thermal radiometer MARA on MASCOT lander (Grott et al., 2019). Furthermore, in the close-up thermal images, there were found boulders colder by 20 °C or more, indicating the thermal inertia of typical carbonaceous chondrite meteorites.</p> <p>Considering these results, we proposed a formation scenario of Ryugu: fluffy cosmic dusts gathered to form porous planetesimals, and then much larger sized but still porous bodies. A low degree of consolidation and alteration has occurred at most of the body, while a higher degree of consolidation or alteration proceeded at the deep interior. Huge meteoritic impacts destroyed and fragmented the bodies, and part of those fragments were re-accreted to form the next generation, rubble-pile bodies (asteroids). Boulders found on Ryugu might have originated from the deep interior of parent bodies, so that most of them are very porous and less consolidated but some of them are relatively dense materials similar to carbonaceous chondrites, which might have originated from the interior. Due to YORP effect, the rotation rate decreased to current one, and the current shape of a spinning top-shape were formed. Analysis of returned sample will make progress in our knowledge of the planetary formation process.</p>

scholarly journals Numerical simulation of highly porous materials in application to supersonic aerodynamics

2017 ◽  
Author(s):  
T. V. Poplavskaya ◽  
S. V. Kirilovskiy ◽  
S. G. Mironov ◽  
I. S. Tsyryulnikov
Keyword(s):  
Numerical Simulation ◽  
Porous Materials ◽  
Highly Porous Materials ◽  
Supersonic Aerodynamics ◽  
Highly Porous

Thermal stability and structural evolution of low-K Fluorinated amorphous carbon during thermal annealing

1998 ◽  
Vol 511 ◽  
Author(s):  
Hongning Yang ◽  
Douglas J. Tweet ◽  
Yanjun Ma ◽  
Tue Nguyen ◽  
David R. Evans ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Dielectric Constant ◽  
Thermal Annealing ◽  
Structural Evolution ◽  
Fluorine Concentration ◽  
Interlayer Dielectric ◽  
Profound Impact ◽  
Initial Stage ◽  
Stress Changes ◽  
Low K

ABSTRACTHighly crosslinked a-F:C films can undergo a significant change after thermal annealing, where the film expands by ∼3%, the density reduces by ∼10% and the internal stress changes from compressive to tensile. The loss of fluorine concentration and the reduction of CF. are accompanied by the transition of (C-C, sp3) to (C=C, sp2) groups. After annealing, the dielectric constant is reduced and the leakage current increases slightly. Most importantly, these changes occur only at the initial stage of annealing. After the initial annealing, the a-F:C film tends to be thermally stable and retains reasonably good electrical properties as a low-k interlayer dielectric. The profound impact of these results on Cu/a-F:C integration will be briefly discussed.

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