On the Nature of Weak Spots in High-k Layers Submitted to Anneals

2004 ◽  
Vol 811 ◽  
Author(s):  
J. Pétry ◽  
W. Vandervorst ◽  
O. Richard ◽  
T. Conard ◽  
P. DeWolf ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Strong Correlation ◽  
Positive Charge ◽  
The Other ◽  
Physical Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Other Hand ◽  
High K ◽  
High K Dielectric

ABSTRACTIn the path to the introduction of high-k dielectric into IC components, a large number of challenges have still to be solved. Some of the major issues concern the low mobility of carriers and the reliability of the devices. Trapped charges in the stack have been identified as being the cause of these issues. With this in mind, we used Conducting Atomic Force Microscopy, combined with physical analysis to understand the nature of these charges. In this contribution, we have studied the uniformity of thin HfO2 layers, with and without anneal. The Conducting Atomic Force microscopy measurements show spots of higher conductivity. Recording local IV's in those ‘weak’ spots suggests that they consist of positive charge. On the other hand, XPS and ToFSIMS analysis show a diffusion of the interfacial SiO2 upwards into the high-k layer. Finally, the comparison of samples with differing high-k material and crystallinity indicates a strong correlation between the weak spots and the presence of silicon in the film.

scholarly journals Atomic Force Microscopy Investigation of the Interactions between the MCM Helicase and DNA

Materials ◽  
2021 ◽  
Vol 14 (3) ◽  
pp. 687
Author(s):  
Amna Abdalla Mohammed Khalid ◽  
Pietro Parisse ◽  
Barbara Medagli ◽  
Silvia Onesti ◽  
Loredana Casalis
Keyword(s):  
Atomic Force Microscopy ◽  
Nucleic Acid ◽  
Single Molecule ◽  
Protein Complex ◽  
The Other ◽  
Contour Length ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mcm Complex ◽  
Dna Double Helix

The MCM (minichromosome maintenance) protein complex forms an hexameric ring and has a key role in the replication machinery of Eukaryotes and Archaea, where it functions as the replicative helicase opening up the DNA double helix ahead of the polymerases. Here, we present a study of the interaction between DNA and the archaeal MCM complex from Methanothermobacter thermautotrophicus by means of atomic force microscopy (AFM) single molecule imaging. We first optimized the protocol (surface treatment and buffer conditions) to obtain AFM images of surface-equilibrated DNA molecules before and after the interaction with the protein complex. We discriminated between two modes of interaction, one in which the protein induces a sharp bend in the DNA, and one where there is no bending. We found that the presence of the MCM complex also affects the DNA contour length. A possible interpretation of the observed behavior is that in one case the hexameric ring encircles the dsDNA, while in the other the nucleic acid wraps on the outside of the ring, undergoing a change of direction. We confirmed this topographical assignment by testing two mutants, one affecting the N-terminal β-hairpins projecting towards the central channel, and thus preventing DNA loading, the other lacking an external subdomain and thus preventing wrapping. The statistical analysis of the distribution of the protein complexes between the two modes, together with the dissection of the changes of DNA contour length and binding angle upon interaction, for the wild type and the two mutants, is consistent with the hypothesis. We discuss the results in view of the various modes of nucleic acid interactions that have been proposed for both archaeal and eukaryotic MCM complexes.

scholarly journals Laser Ablation Ceramic Target for 8YSZ High-k Dielectric Electrolyte thin Films Precessed by PLD on Si(100) and Pt/Si(111)

2020 ◽  
Vol 71 (7) ◽  
pp. 272-277
Author(s):  
Rovena Veronica Pascu
Keyword(s):  
Thin Films ◽  
X Ray Diffraction ◽  
Stabilized Zirconia ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
High K ◽  
Potential Applications ◽  
Electrochemical Devices ◽  
High K Dielectric

The cubic structure 8YSZ (8%Yttria-Stabilized Zirconia) thin films deposited by PLD(Pulsed Laser Deposition) on substrates Si (100) and Pt/Si (111) by identical control parameters have potential applications as electrolytes for planar micro electrochemical devices like Lambda oxygen sensors and IT-�SOFC. It appearance differences in polycrystalline structural and optical characterization by XRD (X-ray Diffraction), SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) and V- VASE (Variable Angle Spectroscopic Ellipsometry. The differences are relating on crystalline dimensions, lattice parameters; surface roughness measured by V- VASE and AFM are presented synthetic to evidence the differences generated by substrates.

Impact of bilayer character on High K gate stack dielectrics breakdown obtained by conductive atomic force microscopy

2013 ◽  
Vol 53 (12) ◽  
pp. 1857-1862 ◽  
Author(s):  
R. Foissac ◽  
S. Blonkowski ◽  
M. Kogelschatz ◽  
P. Delcroix ◽  
M. Gros-Jean ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Gate Stack ◽  
Conductive Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
High K

scholarly journals Multifractal analysis of human canine teeth at nano scale: atomic force microscopy studies

2019 ◽  
Vol 10 (1) ◽  
pp. 15-22 ◽  
Author(s):  
Shahram Solaymani ◽  
Ştefan Ţălu ◽  
Mahmood Ghoranneviss ◽  
Seyed Mohammad Elahi ◽  
Azizollah Shafiekhani ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Multifractal Analysis ◽  
The Other ◽  
Structure Property ◽  
Statistical Parameters ◽  
Force Microscopy ◽  
Atomic Force ◽  
Surface Micromorphology ◽  
Structural Architecture ◽  
Old Men

AbstractThe aim of the present study is to explore the 3-D micromorphology of human canine teeth materials using multifractal analysis through atomic force microscopy (AFM). The 3-D surfaces of ten extracted canine teeth of a group of 40 year old men were studied (enamel, inter enamel, inter dentin, and cementum) by AFM images in tapping mode and on square areas of 1 μm × 1 μm (512 × 512 points). The AFM images and surface multifractal analysis confirm the dependency of surface micromorphology to their structure–property of these materials across the length scales of the teeth structural architecture. Surface statistical parameters and hence, multifractal approach have been considered as reliable and sensitive tools for quantifying the 3-D surface microtexture changes of human canine teeth materials. The surface of inter dentin had the most irregular topography (the width spectrum Δα = 2.8361, value bigger than all the other Δα sample values), while the most regular topography (the width spectrum Δα = 2.6804, value lower than all the other sample values) was found in cementum. It has been concluded that multifractal analyses can be used as mathematical tools to explore the 3-D micromorphology of human canine teeth materials.

Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy

2008 ◽  
Vol 104 (2) ◽  
pp. 024108 ◽  
Author(s):  
A. Paskaleva ◽  
V. Yanev ◽  
M. Rommel ◽  
M. Lemberger ◽  
A. J. Bauer
Keyword(s):  
Atomic Force Microscopy ◽  
Charge Trapping ◽  
Force Microscopy ◽  
Atomic Force ◽  
High K
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