In Stlo High Resolution Electron Microscopy for Interface Studies
Keyword(s):
In situ kinetic measurements on the rate of solid—phase epitaxial regrowth of silicon in a conventional transmission electron microscope are described. The data compare well with those established for the sane material by high voltage electron microscopy and by Rutherford backscattering spectroscopy. High—resolution imaging at the same time provides direct information on atomic mechanisms. It is anticipated that this will beccme a more highly developed procedure in due course, especially for studies of interface reactions.
1989 ◽
Vol 47
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pp. 302-303
1986 ◽
Vol 44
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pp. 390-391
1990 ◽
Vol 48
(4)
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pp. 242-243
1993 ◽
Vol 8
(5)
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pp. 1019-1027
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