scholarly journals Axial Distribution of Plasma Properties in a Hollow Cathode Plasma Discharge

2021 ◽  
Vol 16 (0) ◽  
pp. 1206101-1206101
Author(s):  
Hikaru NAKAMURA ◽  
Masayuki WATANABE
Keyword(s):  
Hollow Cathode ◽  
Plasma Discharge ◽  
Cathode Plasma ◽  
Axial Distribution ◽  
Plasma Properties

Design of Plasma Discharge Structure for Surface Treatment of PP Film

2016 ◽  
Vol 693 ◽  
pp. 77-83 ◽  
Author(s):  
Yi Fang Wen ◽  
Tai Yong Wang ◽  
Hong Wei Wang
Keyword(s):  
Low Temperature ◽  
Hollow Cathode ◽  
Plasma Discharge ◽  
High Energy ◽  
Environment Pollution ◽  
Low Temperature Plasma ◽  
Cathode Plasma ◽  
Temperature Plasma ◽  
Discharge Structure ◽  
Before And After

Low temperature plasma, compared to liquid phase treatment, can effectively overcome the environment pollution, high energy loss and high cost as its high activity. The low temperature plasma, which is not only fairly friendly to the environment but also of less resource consumption, also can realize the cleaning, activating and grafting treatment for materials surface. Based on the numerical model of CRFHCP (Capacitive Radio Frequency Hollow Cathode Plasma) hollow cathode plasma discharge, the key point to affect plasma discharge was analyzed and the morphology of PP film before and after hollow cathode plasma discharge was analyzed. The results showed that the structure of plasma hollow cathode discharge can effectively improved the chemical behaviors of PP film.

The Optimal Design of the Plasma Discharge Structure of the Far Zone of the Hollow Cathode

2013 ◽  
Vol 819 ◽  
pp. 344-349
Author(s):  
Yi Fang Wen ◽  
Yan Nian Rui ◽  
Chuang Chen ◽  
Hong Wei Wang
Keyword(s):  
Hollow Cathode ◽  
Plasma Discharge ◽  
Simulation Software ◽  
Particle Simulation ◽  
Ion Concentration ◽  
Large Area ◽  
Cathode Plasma ◽  
Plasma Surface ◽  
Discharge Structure ◽  
Nozzle Structure

The discharge of RF hollow cathode far zone plasma has advantages of high ion concentration, easy to implement the processing of a large area, given more and more attention. The characteristics of hollow cathode plasma flow have a great relationship with the hollow cathode nozzle structure. How to design the hollow cathode nozzle discharge structure accurately and conveniently is the key problem of the hollow cathode far plasma surface treatment. This article builds a hollow cathode plasma discharge self-consistent model; derive the relationship between the discharge current of the hollow cathode plasma and the hollow cathode nozzle structure. Optimize the design of the hollow cathode discharge structure using discharge particle simulation software, to achieve a fast and accurate design and the purpose of efficient plasma surface modification.

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