scholarly journals Determination of ultratrace metallic impurities in metal-oxide thin films for ferroelectric random-access memories by precipitation separation/ICP-MS and ETAAS

2003 ◽  
Vol 52 (6) ◽  
pp. 447-453 ◽  
Author(s):  
Motonaka YABUKI
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Random Access ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Icp Ms ◽  
Ferroelectric Random Access Memories ◽  
Metallic Impurities

scholarly journals Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS

Talanta ◽  
2020 ◽  
Vol 217 ◽  
pp. 121012
Author(s):  
C. Herzig ◽  
J. Frank ◽  
A.K. Opitz ◽  
J. Fleig ◽  
A. Limbeck
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Quantitative Imaging ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Complex Metal ◽  
Icp Ms ◽  
Complex Metal Oxide

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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