422 Million Q Planar Integrated All-Waveguide Resonator with a 3.4 Billion Absorption Limited Q, Sub-MHz Linewidth and 3005 Finesse

High Q optical resonators that are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration of these resonators in a photonic waveguide wafer-scale platform is key to reducing their cost, size and power as well as sensitivity to environmental disturbances. However, to date, the intrinsic Q of integrated all-waveguide resonators has been relegated to below 150 Million for a non-etched waveguide resonator and 230 Million for a waveguide-coupled etched silica microresonator. Here, we report an all-waveguide Si3N4 resonator with an intrinsic Q of 422 Million and a 3.4 Billion absorption loss limited Q. The resonator linewidth measures at 453 kHz intrinsic linewidth, 906 kHz loaded linewidth with finesse of 3005. The corresponding linear loss of 0.060 dB/m is the lowest reported to date for an all-waveguide design with deposited upper cladding oxide. These are the highest intrinsic and absorption loss limited Q factors and lowest linewidth reported to date for a photonic integrated all-waveguide resonator. This level of performance is achieved through a careful reduction of scattering and absorption loss components and redeposition of a thin nitride layer. We quantify, simulate and measure the various loss contributions including scattering and absorption and describe a surface-state dangling bond absorption that we believe is passivated by the redeposited layer. In addition to the ultra-high Q and narrow linewidth, the resonator has a large optical mode area and volume, both critical for ultra-low laser linewidths and ultra-stable, ultra-low frequency noise reference cavities. These results demonstrate the performance of bulk optic and etched resonators can be realized in a photonic integrated solution, paving the way towards photonic integration compatible Billion Q cavities for precision scientific systems and applications such as nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications systems on-chip.