scholarly journals Формирование и исследование локально-растянутых Ge-микроструктур для кремниевой фотоники

Author(s):  
А.В. Новиков ◽  
Д.В. Юрасов ◽  
Е.Е. Морозова ◽  
Е.В. Скороходов ◽  
В.А. Вербус ◽  
...  

AbstractThe formation and properties of locally tensile strained Ge microstructures (“microbridges”) based on Ge layers grown on silicon substrates are investigated. The elastic-strain distribution in suspended Ge microbridges is analyzed theoretically. This analysis indicates that, in order to attain the maximum tensile strain within a microbridge, the accumulation of strain in all corners of the fabricated microstructure has to be minimized. Measurements of the local strain using Raman scattering show significant enhancement of the tensile strain from 0.2–0.25% in the initial Ge film to ~2.4% in the Ge microbridges. A considerable increase in the luminescence intensity and significant modification of its spectrum in the regions of maximum tensile strain in Ge microbridges and in their vicinity as compared to weakly strained regions of the initial Ge film is demonstrated by microphotoluminescence spectroscopy.

Nanomaterials ◽  
2020 ◽  
Vol 10 (2) ◽  
pp. 218 ◽  
Author(s):  
Huamin Chen ◽  
Longfeng Lv ◽  
Jiushuang Zhang ◽  
Shaochun Zhang ◽  
Pengjun Xu ◽  
...  

Stretchable and wearable opto-electronics have attracted worldwide attention due to their broad prospects in health monitoring and epidermal applications. Resistive strain sensors, as one of the most typical and important device, have been the subject of great improvements in sensitivity and stretchability. Nevertheless, it is hard to take both sensitivity and stretchability into consideration for practical applications. Herein, we demonstrated a simple strategy to construct a highly sensitive and stretchable graphene-based strain sensor. According to the strain distribution in the simulation result, highly sensitive planar graphene and highly stretchable crumpled graphene (CG) were rationally connected to effectively modulate the sensitivity and stretchability of the device. For the stretching mode, the device showed a gauge factor (GF) of 20.1 with 105% tensile strain. The sensitivity of the device was relatively high in this large working range, and the device could endure a maximum tensile strain of 135% with a GF of 337.8. In addition, in the bending mode, the device could work in outward and inward modes. This work introduced a novel and simple method with which to effectively monitor sensitivity and stretchability at the same time. More importantly, the method could be applied to other material categories to further improve the performance.


2017 ◽  
Vol 897 ◽  
pp. 177-180 ◽  
Author(s):  
Susumu Tsukimoto ◽  
Tatsuhiko Ise ◽  
Genta Maruyama ◽  
Satoshi Hashimoto ◽  
Tsuguo Sakurada ◽  
...  

Evaluation of surface damage layers formed by mechanical grinding processes is indispensable in epi-ready SiC wafer preparation. As well as microstructure, the analysis of local strain distribution in the damage layers gives a clue on control of the wafer quality. Advanced electron backscatter diffraction (EBSD) technique is applied to evaluate the strain distribution of the damage layers. It is revealed that the elastic strain distribution can be classified into a hierarchy of three regions with respect to depth from the surface. Combining EBSD analysis with TEM observation, large compressive elastic strain and misorientation are introduced in the highly-defective region underneath the ground wafer surface. In addition, the gradient distribution of the strain is observed clearly below the highly-defective region. The knowledge of correlating between strain distribution and microstructure is promising to control the damage layer for the wafer preparation.


2021 ◽  
Vol 16 (4) ◽  
pp. 126-152
Author(s):  
Kang Yao ◽  
Xin Jiang ◽  
Jin Jiang ◽  
Zhonghao Yang ◽  
Yanjun Qiu

In order to investigate the influence of modulus of the base layer on the strain distribution for asphalt pavement, the modulus ratio of the base layer and the AC layer (Rm) is introduced as a controlled variable when keeping modulus of the AC layer as a constant in this paper. Then, a three-layered pavement structure is selected as an analytical model, which consists of an AC layer with the constant modulus and a base layer with the variable modulus covering the subgrade. A three dimensional (3D) finite element model was established to estimate the strains along the horizontal and vertical direction in the AC layer under different Rm. The results show that Rm will change the distribution of the horizontal strains along the depth in the AC layer; the increase of Rm could reduce the maximum tensile strain in the AC layer, but its effect is limited; the maximum tensile strain in the AC layer does not necessarily occur at the bottom, but gradually rises to the middle with the increase of Rm. Rm could significantly decline the bottom strain in the AC layer, and there is a certain difference between the bottom and the maximum strain when Rm is greater than or equal to one, which will enlarge with increasing Rm. Rm could change the depth of the neutral axis in the AC layer, and the second neutral axis will appear at the bottom of the AC layer under a sufficiently large Rm. The average vertical compressive strain in the AC layer will significantly enlarge with the increase of Rm.


Author(s):  
Koenraad G F Janssens ◽  
Omer Van der Biest ◽  
Jan Vanhellemont ◽  
Herman E Maes ◽  
Robert Hull

There is a growing need for elastic strain characterization techniques with submicrometer resolution in several engineering technologies. In advanced material science and engineering the quantitative knowledge of elastic strain, e.g. at small particles or fibers in reinforced composite materials, can lead to a better understanding of the underlying physical mechanisms and thus to an optimization of material production processes. In advanced semiconductor processing and technology, the current size of micro-electronic devices requires an increasing effort in the analysis and characterization of localized strain. More than 30 years have passed since electron diffraction contrast imaging (EDCI) was used for the first time to analyse the local strain field in and around small coherent precipitates1. In later stages the same technique was used to identify straight dislocations by simulating the EDCI contrast resulting from the strain field of a dislocation and comparing it with experimental observations. Since then the technique was developed further by a small number of researchers, most of whom programmed their own dedicated algorithms to solve the problem of EDCI image simulation for the particular problem they were studying at the time.


2021 ◽  
pp. 2100201
Author(s):  
Philipp Jordt ◽  
Stjepan B. Hrkac ◽  
Jorit Gröttrup ◽  
Anton Davydok ◽  
Christina Krywka ◽  
...  

2017 ◽  
Vol 26 (1-2) ◽  
pp. 1-8
Author(s):  
Nikoletta Florini ◽  
George P. Dimitrakopulos ◽  
Joseph Kioseoglou ◽  
Nikos T. Pelekanos ◽  
Thomas Kehagias

AbstractWe are briefly reviewing the current status of elastic strain field determination in III–V heteroepitaxial nanostructures, linking finite elements (FE) calculations with quantitative nanoscale imaging and atomistic calculation techniques. III–V semiconductor nanostructure systems of various dimensions are evaluated in terms of their importance in photonic and microelectronic devices. As elastic strain distribution inside nano-heterostructures has a significant impact on the alloy composition, and thus their electronic properties, it is important to accurately map its components both at the interface plane and along the growth direction. Therefore, we focus on the determination of the stress-strain fields in III–V heteroepitaxial nanostructures by experimental and theoretical methods with emphasis on the numerical FE method by means of anisotropic continuum elasticity (CE) approximation. Subsequently, we present our contribution to the field by coupling FE simulations on InAs quantum dots (QDs) grown on (211)B GaAs substrate, either uncapped or buried, and GaAs/AlGaAs core-shell nanowires (NWs) grown on (111) Si, with quantitative high-resolution transmission electron microscopy (HRTEM) methods and atomistic molecular dynamics (MD) calculations. Full determination of the elastic strain distribution can be exploited for band gap tailoring of the heterostructures by controlling the content of the active elements, and thus influence the emitted radiation.


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