scholarly journals Моды разряда пеннинговского ионного источника при импульсном и стационарном режиме питания

2019 ◽  
Vol 89 (9) ◽  
pp. 1367
Author(s):  
Н.В. Мамедов ◽  
С.П. Масленников ◽  
Ю.К. Пресняков ◽  
А.А. Солодовников ◽  
Д.И. Юрков
Keyword(s):  
Repetition Rate ◽  
Pulse Repetition Rate ◽  
Ion Source ◽  
Pulsed Power ◽  
Power Supplies ◽  
Voltage Amplitude ◽  
Current Voltage ◽  
Current Voltage Characteristics ◽  
Anode Pulse ◽  
Source Operation

AbstractWe have analyzed the pressure dependences of the discharge and extracted currents for a Penning ion source (PIS) for continuous and pulsed power supplies. We have investigated the effect of voltage amplitude at the PIS anode, pulse repetition rate, and pulse duration on PIS amplitude–time and current–voltage characteristics. The ion source operation regimes and corresponding gas pressure ranges in which different modes of Penning discharge are realized have been determined.

scholarly journals DISCHARGE CHARACTERISTICS OF COMBINED LOW ENERGY ION SOURCE – MAGNETRON SPUTTERING SYSTEM

2020 ◽  
pp. 169-173
Author(s):  
A. Zykov ◽  
N. Yefymenko ◽  
S. Dudin ◽  
S. Yakovin
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Magnetron Discharge ◽  
Discharge Characteristics ◽  
Autonomous Operation ◽  
Current Voltage ◽  
Planar Magnetron ◽  
Current Voltage Characteristics ◽  
Pressure Magnitude ◽  
Sputtering System

The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude and topology of magnetic field have been researched both for autonomous operation of the planar magnetron discharge and Hall type ion source in plasma mode and for their combination. Spatial distributions of ion current are also presented.

Current-voltage characteristics of a gas field ion source

1988 ◽  
Vol 46 (4) ◽  
pp. 313-323 ◽  
Author(s):  
K. Jousten ◽  
K. B�hringer ◽  
S. Kalbitzer
Keyword(s):  
Ion Source ◽  
Gas Field ◽  
Current Voltage ◽  
Current Voltage Characteristics
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