Достоверность выявления пронизывающих дислокаций в эпитаксиальных пленках с помощью структурно-чувствительного травления
2018 ◽
Vol 44
(20)
◽
pp. 30
Keyword(s):
AbstractCorrespondence between threading dislocations (TDs) in epitaxial films and the etch pits observed upon selective chemical etching of the samples was studied in Ge/Si(001) heterostructures. It is established that the density of TDs revealed in epitaxial films with thicknesses h ≤ 1 μm can be significantly understated because of insufficient resolution of optical microscopy. Recommendations are given that increase the reliability of PD density estimation by means of structure-sensitive etching.
2004 ◽
Vol 36
(1-3)
◽
pp. 353-358
◽
2014 ◽
Keyword(s):