Получение тонких пленок графита на диэлектрической подложке с помощью гетероэпитаксиального синтеза
2020 ◽
Vol 46
(10)
◽
pp. 38
Keyword(s):
The results of testing the methods of preparation of thin graphite films on a dielectric substrate by the method of annealing the structure of (0001) Al2O3/(111) Ni/ta-C are present. The method is based on catalytic decomposition of hydrocarbons on the surface of the monocrystalline film of the metal-catalyst on the surface of the dielectric substrate and subsequent diffusion and crystallization of carbon between the metal film and the substrate. After chemical etching of the metal film, a thin graphite film with low density of crystal structure defects on a dielectric substrate is obtained.
2020 ◽
Vol 1697
◽
pp. 012110
2020 ◽
Vol 6
(4)
◽
pp. 158-178
2019 ◽
Vol 16
(11)
◽
pp. 2066
◽
2017 ◽
Vol 29
(5)
◽
pp. 4211-4216
◽
2011 ◽
Vol 67
(a1)
◽
pp. C807-C807
2013 ◽
Vol 594-595
◽
pp. 63-67