ДАТЧИК ДАВЛЕНИЯ НА ПОВЕРХНОСТНЫХ АКУСТИЧЕСКИХ ВОЛНАХ С ЗЕРКАЛЬНОЙ ТОПОЛОГИЕЙ

Предложена новая конструкция датчиков давления, реализующая зеркальную топологию чувствительного элемента. Применение линий задержки позволяет создавать пассивные устройства, работающие на больших дальностях. Предлагаемое решение расширяет область применения зеркальных топологий для измерений давления. The liquid and gas pressure sensor is one of the most required sensors. Usually, resonator circuits are used in the passive wireless sensors based on surface acoustic waves. Wide application of pressure measurements resonators is caused by their small dimensions and, accordingly, by possibility to choose the part with low irregularity of parameter on the membrane (first of all a surface acoustic waves velocity). The sensitive elements based on surface acoustic waves delay lines have bigger linear dimensions than those with resonators. However, delay lines are less sensitive to irregularity of surface acoustic waves velocity distribution along acoustic way, and in practice to reach a long distance with a considerable number of random echo it is necessary to provide the significant (up to 4 |xs) delay of the sensor information response. The paper presents a new design, which implements the mirror topology of the sensitive element of pressure sensors. The use of delay lines allows the creation of passive devices operating at long ranges. The proposed solution extends the field of application of mirror topologies for pressure measurements.