scholarly journals In-Situ Heating Observation for Formation Behavior of Polycrystalline Silicon Thin Films Fabricated Using Aluminum Induced Crystallization

2007 ◽  
Vol 71 (2) ◽  
pp. 158-163 ◽  
Author(s):  
Ken-ichi Ikeda ◽  
Takeshi Hirota ◽  
Kensuke Fujimoto ◽  
Youhei Sugimoto ◽  
Naoki Takata ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Formation Behavior ◽  
In Situ Heating ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

Preparation of high quality polycrystalline silicon thin films by aluminum-induced crystallization

2009 ◽  
Vol 517 (19) ◽  
pp. 5611-5615 ◽  
Author(s):  
Zhengxia Tang ◽  
Honglie Shen ◽  
Haibin Huang ◽  
Linfeng Lu ◽  
Yugang Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
High Quality ◽  
Silicon Thin Films ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation
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