On the Discontinuity of Polycrystalline Silicon Thin Films Realized by Aluminum-Induced Crystallization of PECVD-Deposited Amorphous Si

2017 ◽  
Vol 47 (2) ◽  
pp. 145-150
Author(s):  
Qingtao Pan ◽  
Tao Wang ◽  
Hui Yan ◽  
Ming Zhang ◽  
Yaohua Mai
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Amorphous Si ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

Preparation of high quality polycrystalline silicon thin films by aluminum-induced crystallization

2009 ◽  
Vol 517 (19) ◽  
pp. 5611-5615 ◽  
Author(s):  
Zhengxia Tang ◽  
Honglie Shen ◽  
Haibin Huang ◽  
Linfeng Lu ◽  
Yugang Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
High Quality ◽  
Silicon Thin Films ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization
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