Polycrystalline silicon thin films on glass by aluminum-induced crystallization

IEEE Transactions on Electron Devices ◽

10.1109/16.791997 ◽

1999 ◽

Vol 46 (10) ◽

pp. 2062-2068 ◽

Author(s):

O. Nast ◽

S. Brehme ◽

D.H. Neuhaus ◽

S.R. Wenham

Keyword(s):

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Polycrystalline silicon thin films by aluminum induced crystallization of amorphous silicon

Applied Surface Science ◽

10.1016/j.apsusc.2012.09.019 ◽

2013 ◽

Vol 264 ◽

pp. 11-16 ◽

Author(s):

T. Wang ◽

H. Yan ◽

M. Zhang ◽

X. Song ◽

Q. Pan ◽

...

Keyword(s):

Amorphous Silicon ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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In situObservation of Polycrystalline Silicon Thin Films Grown Using Aluminum-Doped Zinc Oxide on Glass Substrate by the Aluminum-Induced Crystallization

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.04dp02 ◽

2011 ◽

Vol 50 (4S) ◽

pp. 04DP02 ◽

Author(s):

Mina Jung ◽

Atsushi Okada ◽

Takanobu Saito ◽

Takashi Suemasu ◽

Chan-Yeup Chung ◽

...

Keyword(s):

Glass Substrate ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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On the Controlling Mechanism of Preferential Orientation of Polycrystalline-Silicon Thin Films Grown by Aluminum-Induced Crystallization

Applied Physics Express ◽

10.1143/apex.3.095803 ◽

2010 ◽

Vol 3 (9) ◽

pp. 095803 ◽

Author(s):

Mina Jung ◽

Atsushi Okada ◽

Takanobu Saito ◽

Takashi Suemasu ◽

Noritaka Usami

Keyword(s):

Polycrystalline Silicon ◽

Preferential Orientation ◽

Silicon Thin Films ◽

Controlling Mechanism ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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In situObservation of Polycrystalline Silicon Thin Films Grown Using Aluminum-Doped Zinc Oxide on Glass Substrate by the Aluminum-Induced Crystallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.04dp02 ◽

2011 ◽

Vol 50 (4) ◽

pp. 04DP02 ◽

Author(s):

Mina Jung ◽

Atsushi Okada ◽

Takanobu Saito ◽

Takashi Suemasu ◽

Chan-Yeup Chung ◽

...

Keyword(s):

Glass Substrate ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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In-Situ Heating Observation for Formation Behavior of Polycrystalline Silicon Thin Films Fabricated Using Aluminum Induced Crystallization

Journal of the Japan Institute of Metals and Materials ◽

10.2320/jinstmet.71.158 ◽

2007 ◽

Vol 71 (2) ◽

pp. 158-163 ◽

Author(s):

Ken-ichi Ikeda ◽

Takeshi Hirota ◽

Kensuke Fujimoto ◽

Youhei Sugimoto ◽

Naoki Takata ◽

...

Keyword(s):

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Formation Behavior ◽

In Situ Heating ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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On the Discontinuity of Polycrystalline Silicon Thin Films Realized by Aluminum-Induced Crystallization of PECVD-Deposited Amorphous Si

Brazilian Journal of Physics ◽

10.1007/s13538-016-0484-6 ◽

2017 ◽

Vol 47 (2) ◽

pp. 145-150

Author(s):

Qingtao Pan ◽

Tao Wang ◽

Hui Yan ◽

Ming Zhang ◽

Yaohua Mai

Keyword(s):

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Amorphous Si ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

MATERIALS TRANSACTIONS ◽

10.2320/matertrans.mra2007312 ◽

2008 ◽

Vol 49 (4) ◽

pp. 723-727 ◽

Author(s):

Seiichiro Ii ◽

Takeshi Hirota ◽

Kensuke Fujimoto ◽

Youhei Sugimoto ◽

Naoki Takata ◽

...

Keyword(s):

Polycrystalline Silicon ◽

Direct Evidence ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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A study of polycrystalline silicon thin films as a seed layer in liquid phase epitaxy using aluminum-induced crystallization

Current Applied Physics ◽

10.1016/s1567-1739(01)00084-0 ◽

2002 ◽

Vol 2 (2) ◽

pp. 129-133 ◽

Author(s):

Hyeongnam Kim ◽

Gyuyul Lee ◽

Daewon Kim ◽

Soo-Hong Lee

Keyword(s):

Liquid Phase ◽

Liquid Phase Epitaxy ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Preparation of high quality polycrystalline silicon thin films by aluminum-induced crystallization

Thin Solid Films ◽

10.1016/j.tsf.2009.01.189 ◽

2009 ◽

Vol 517 (19) ◽

pp. 5611-5615 ◽

Author(s):

Zhengxia Tang ◽

Honglie Shen ◽

Haibin Huang ◽

Linfeng Lu ◽

Yugang Yin ◽

...

Keyword(s):

Polycrystalline Silicon ◽

High Quality ◽

Silicon Thin Films ◽

Induced Crystallization ◽

Aluminum Induced Crystallization

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Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing

Current Applied Physics ◽

10.1016/j.cap.2012.04.010 ◽

2012 ◽

Vol 12 (6) ◽

pp. 1454-1458 ◽

Author(s):

Kyung Min Ahn ◽

Seung Mo Kang ◽

Byung Tae Ahn

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Polycrystalline Silicon ◽

Silicon Thin Films ◽

Sequential Combination ◽

Induced Crystallization

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