Reliability and Failure Analysis of RF MEMS Switches

ISTFA 2002: Conference Proceedings from the 28th International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2002p0275 ◽

2002 ◽

Author(s):

Ingrid De Wolf ◽

Anne Jourdain ◽

Ann Witvrouw ◽

Paolo Fiorini ◽

Harrie A. C. Tilmans ◽

...

Keyword(s):

Failure Analysis ◽

Rf Mems ◽

Optical Investigation ◽

Capacitive Switches ◽

Mems Switches ◽

Rf Mems Switches ◽

Lifetime Testing

Abstract In this paper we discuss reliability and failure analysis issues of RF-MEMS capacitive switches. We describe specific instrumentation and methods that can be used for testing and examination of these switches. These include SEM, AFM, SAM, static and dynamic optical investigation and electrical lifetime testing. Processing as well as testing and packaging issues are discussed.

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Experimental Investigation of Dynamic Response of RF-MEMS Switches

Microelectromechanical Systems ◽

10.1115/imece2004-61009 ◽

2004 ◽

Cited By ~ 1

Author(s):

O. Burak Ozdoganlar ◽

David S. Epp ◽

Christopher W. Dyck

Keyword(s):

Microelectromechanical Systems ◽

Rf Mems ◽

Electrical Contacts ◽

Mode Shapes ◽

Main Function ◽

Capacitive Switches ◽

Mems Switches ◽

Damping Characteristics ◽

Rf Mems Switches ◽

Opening And Closing

Ohmic and capacitive switches constitute an important segment of radio frequency microelectromechanical systems (RF-MEMS) components. The main function of these switches is to provide very rapid opening and closing of electrical contacts. To fulfill this requirement, the structural dynamics and coupled-physics response of candidate switch designs must be thoroughly understood. This paper presents a set of dynamic experimentation of two RF-MEMS ohmic switches with different geometries to determine their natural frequencies, mode shapes, and damping characteristics at pressures spanning from vacuum to atmospheric. The experimental facility used for the tests is also described in detail.

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Electrostatic discharge failure analysis of capacitive RF MEMS switches

Microelectronics Reliability ◽

10.1016/j.microrel.2007.07.070 ◽

2007 ◽

Vol 47 (9-11) ◽

pp. 1818-1822 ◽

Cited By ~ 15

Author(s):

J. Ruan ◽

N. Nolhier ◽

M. Bafleur ◽

L. Bary ◽

F. Coccetti ◽

...

Keyword(s):

Failure Analysis ◽

Rf Mems ◽

Electrostatic Discharge ◽

Mems Switches ◽

Rf Mems Switches

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Neural Based Lumped Element Model of Capacitive RF MEMS Switches

Frequenz ◽

10.1515/freq-2018-0023 ◽

2018 ◽

Vol 72 (11-12) ◽

pp. 539-546 ◽

Cited By ~ 3

Author(s):

Tomislav Ćirić ◽

Rohan Dhuri ◽

Zlatica Marinković ◽

Olivera Pronić-Rančić ◽

Vera Marković ◽

...

Keyword(s):

Neural Networks ◽

Good Accuracy ◽

Rf Mems ◽

Element Model ◽

Capacitive Switches ◽

Mems Switches ◽

Lumped Element ◽

Rf Mems Switches ◽

Lumped Element Model ◽

The Relationship

Abstract In this paper a lumped element model of RF MEMS capacitive switches which is scalable with the lateral dimensions of the bridge is proposed. The dependence of the elements of the model on the bridge dimensions is introduced by using one or more artificial neural networks to model the relationship between the bridge dimensions and the inductive and resistive elements of the lumped element model. The achieved results show that the developed models have a good accuracy over the whole considered range of the bridge dimension values.

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