LOW-COST THERMAL MEMS GYROSCOPE

MEMS inertial sensors using underground azimuth measurement, with small size, high accuracy, low cost and good stability, the control and drive system is very important. This paper presents the autonomous underground azimuth measurement drive system based on MEMS gyroscope. Using MEMS gyroscope as a measuring element, driven by a brushless DC motor, using a combination of photoelectric encoder, according to the underground azimuth measurement principle, this paper proposed a autonomous measurement method, discussing the design principles of the program, the components of the system, and the communication problems between the gyroscope and other part. Overcoming the high cost of traditional logging tool and the complex control problem, experimental results verify that the system is able to achieve underground azimuth measurement purposes. Error in 1.5°or less, with outstanding engineering applications.

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A New Test Method and System of Low-cost MEMS Gyroscope

2007 8th International Conference on Electronic Measurement and Instruments ◽

10.1109/icemi.2007.4351144 ◽

2007 ◽

Author(s):

Zhang Haipeng ◽

Zhao Jingbo ◽

Zhou Xianglong ◽

Jiang Hailong

Keyword(s):

Low Cost ◽

Test Method ◽

Mems Gyroscope

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Low cost manner of gaining car position utilizing odometry, MEMS gyroscope and magnetometer

2020 Cybernetics & Informatics (K&I) ◽

10.1109/ki48306.2020.9039880 ◽

2020 ◽

Author(s):

Vojtech Simak ◽

Dusan Nemec ◽

Jozef Hrbcek ◽

Emilia Bubenikova

Keyword(s):

Low Cost ◽

Mems Gyroscope

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A new MEMS gyroscope drift suppression method for the low-cost untwisting spin platform

IEEJ Transactions on Electrical and Electronic Engineering ◽

10.1002/tee.22373 ◽

2016 ◽

Vol 12 (2) ◽

pp. 262-268 ◽

Cited By ~ 2

Author(s):

Decheng Wang ◽

Hui Lin

Keyword(s):

Low Cost ◽

Mems Gyroscope ◽

Suppression Method

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A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Applied Sciences ◽

10.3390/app11031129 ◽

2021 ◽

Vol 11 (3) ◽

pp. 1129

Author(s):

Francesca Pistorio ◽

Muhammad Mubasher Saleem ◽

Aurelio Somà

Keyword(s):

Operating Temperature ◽

Low Cost ◽

Resonant Mode ◽

Silicon On Insulator ◽

Micro Electro Mechanical Systems ◽

Mems Gyroscope ◽

Sensing Applications ◽

Frequency Mismatch ◽

Mechanical Spring ◽

Cross Axis

The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.

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Retrieval of Ocean Bottom and Downhole Seismic sensors orientation using integrated MEMS gyroscope and direct rotation measurements

Advances in Geosciences ◽

10.5194/adgeo-40-11-2014 ◽

2014 ◽

Vol 40 ◽

pp. 11-17 ◽

Cited By ~ 6

Author(s):

A. D'Alessandro ◽

G. D'Anna

Keyword(s):

Angular Displacement ◽

Low Cost ◽

Angular Rate ◽

Ocean Bottom ◽

Mems Gyroscope ◽

Absolute Orientation ◽

Sensor Orientation ◽

Seismic Sensors ◽

The Absolute ◽

Almost All

Abstract. The absolute orientation of the horizontal components of ocean bottom or downhole seismic sensors are generally unknown. Almost all the methods proposed to overcome this issue are based on the post-processing of the acquired signals and so the results are strongly dependent on the nature, quantity and quality of the acquired data. We have carried out several test to evaluate the ability of retrieve sensor orientation using integrated low cost MEMS gyroscope. Our tests have shown that the tested MEMS gyroscope (the model 1044_0–3/3/3 Phidget Spatial Precision High Resolution) can be used to measure angular displacement and therefore to retrieve the absolute orientation of the horizontal components of a sensor that has been subjected to rotation in the horizontal plane. A correct processing of the acquired signals permit to retrieve, for rotation at angular rate between 0 and 180° s−1, angular displacement with error less 2°.

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