scholarly journals A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021 ◽  
Vol 11 (3) ◽  
pp. 1129
Author(s):  
Francesca Pistorio ◽  
Muhammad Mubasher Saleem ◽  
Aurelio Somà
Keyword(s):  
Operating Temperature ◽  
Low Cost ◽  
Resonant Mode ◽  
Silicon On Insulator ◽  
Micro Electro Mechanical Systems ◽  
Mems Gyroscope ◽  
Sensing Applications ◽  
Frequency Mismatch ◽  
Mechanical Spring ◽  
Cross Axis

The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.

MEMS Scanning Mirror with Vertical Comb Actuator Based on Latching Technique

2013 ◽  
Vol 712-715 ◽  
pp. 2202-2205
Author(s):  
Qing Hua Chen ◽  
Yan Mei Li ◽  
Ying Jun Chen ◽  
Wen Gang Wu
Keyword(s):  
Small Variation ◽  
Optical Switches ◽  
Silicon On Insulator ◽  
Driving Voltage ◽  
Micro Electro Mechanical Systems ◽  
Scanning Angle ◽  
Scanning Mirror ◽  
Batch Fabrication ◽  
Mechanical Spring ◽  
Novel Design

A MEMS(Micro-Electro-Mechanical Systems) scanning mirror with vertical comb actuator was designed, modeled, fabricated and tested, which can be widely applied in scanning micromirrors, optical switches, and variable capacitors. Purposive latching has been successfully applied to the batch fabrication of vertical comb actuators made of silicon on insulator (SOI). The manufacturing process is introduced, and a novel design of latching structure and mechanical spring is also presented. The latching of microstructures is enabled in a controlled manner and significantly reduces the distance between the combs, reducing the driving voltage. The prototype microactuators operate at the driving voltage of 28 Vdc with 9.6 optical angle. A reliability test on an unpackaged actuator with more than 100 million cycles of operation showed extremely small variation in the scanning angle and the driving voltage, showing no sign of degradation in the induced latching interface or the microstructures.

Computer simulation study about the dependence of amorphous silicon photonic waveguides efficiency on the material quality

2020 ◽  
Vol 90 (3) ◽  
pp. 30502
Author(s):  
Alessandro Fantoni ◽  
João Costa ◽  
Paulo Lourenço ◽  
Manuela Vieira
Keyword(s):  
Amorphous Silicon ◽  
High Throughput Screening ◽  
Simulation Analysis ◽  
Low Cost ◽  
Deposition Process ◽  
Large Area ◽  
Sidewall Roughness ◽  
Sensing Applications ◽  
Fabrication Defects ◽  
The Impact

Amorphous silicon PECVD photonic integrated devices are promising candidates for low cost sensing applications. This manuscript reports a simulation analysis about the impact on the overall efficiency caused by the lithography imperfections in the deposition process. The tolerance to the fabrication defects of a photonic sensor based on surface plasmonic resonance is analysed. The simulations are performed with FDTD and BPM algorithms. The device is a plasmonic interferometer composed by an a-Si:H waveguide covered by a thin gold layer. The sensing analysis is performed by equally splitting the input light into two arms, allowing the sensor to be calibrated by its reference arm. Two different 1 × 2 power splitter configurations are presented: a directional coupler and a multimode interference splitter. The waveguide sidewall roughness is considered as the major negative effect caused by deposition imperfections. The simulation results show that plasmonic effects can be excited in the interferometric waveguide structure, allowing a sensing device with enough sensitivity to support the functioning of a bio sensor for high throughput screening. In addition, the good tolerance to the waveguide wall roughness, points out the PECVD deposition technique as reliable method for the overall sensor system to be produced in a low-cost system. The large area deposition of photonics structures, allowed by the PECVD method, can be explored to design a multiplexed system for analysis of multiple biomarkers to further increase the tolerance to fabrication defects.

scholarly journals Current Trends in Polymer Based Sensors

Chemosensors ◽  
2021 ◽  
Vol 9 (5) ◽  
pp. 108
Author(s):  
Giancarla Alberti ◽  
Camilla Zanoni ◽  
Vittorio Losi ◽  
Lisa Rita Magnaghi ◽  
Raffaela Biesuz
Keyword(s):  
Chemical Structure ◽  
Low Cost ◽  
Sensing Applications ◽  
Current Trends ◽  
Manufacturing Methods ◽  
New Devices

This review illustrates various types of polymer and nanocomposite polymeric based sensors used in a wide variety of devices. Moreover, it provides an overview of the trends and challenges in sensor research. As fundamental components of new devices, polymers play an important role in sensing applications. Indeed, polymers offer many advantages for sensor technologies: their manufacturing methods are pretty simple, they are relatively low-cost materials, and they can be functionalized and placed on different substrates. Polymers can participate in sensing mechanisms or act as supports for the sensing units. Another good quality of polymer-based materials is that their chemical structure can be modified to enhance their reactivity, biocompatibility, resistance to degradation, and flexibility.

scholarly journals Optimization of Mordenite Membranes Using Sucrose Precursor for Pervaporation of Water-Ethanol Mixtures

Membranes ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 160
Author(s):  
Abdulaziz A. Alomair ◽  
Yousef Alqaheem
Keyword(s):  
Pyrolysis Temperature ◽  
Operating Temperature ◽  
Selective Adsorption ◽  
Sucrose Concentration ◽  
Low Cost ◽  
Water Flux ◽  
Separation Performance ◽  
Carbon Membranes ◽  
Adsorption Of Water ◽  
High Separation

Post-treated mordenite membranes were prepared using sucrose (C12H22O11) as a carbon precursor to block any pinholes and defects in the zeolite layer. The pervaporation (PV) process was used to separate ethanol from the water. The effects of the sucrose concentration and the pyrolysis temperature (650–850 °C) were investigated, and the resulting high separation performance compared to those post/pre-treated membranes was reported in the literature. In this study, mordenite carbon membranes yielded a water/ethanol separation factor of 990.37 at a water flux of 9.10 g/m2h. The influence of the operating temperature on the performance of the membrane also was considered. It was concluded that the selective adsorption of water through zeolite pores was achieved. The entire preparation procedure was achieved using a rapid, low-cost preparation process.

scholarly journals Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 902
Author(s):  
Hussamud Din ◽  
Faisal Iqbal ◽  
Byeungleul Lee
Keyword(s):  
Microelectromechanical Systems ◽  
Reduction Rate ◽  
Design Technique ◽  
Matching Method ◽  
Mems Gyroscope ◽  
Mode Split ◽  
The Cross ◽  
The Individual ◽  
Cross Axis ◽  
Ratio Matching

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

scholarly journals Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 143
Author(s):  
Sitao Fei ◽  
Hao Ren
Keyword(s):  
Quality Factor ◽  
Bottom Electrode ◽  
Temperature Stability ◽  
Cryogenic Cooling ◽  
Silicon On Insulator ◽  
Temperature Hysteresis ◽  
Sensing Applications ◽  
Doped Silicon ◽  
Heavily Doped ◽  
Contour Mode

As a result of their IC compatibility, high acoustic velocity, and high thermal conductivity, aluminum nitride (AlN) resonators have been studied extensively over the past two decades, and widely implemented for radio frequency (RF) and sensing applications. However, the temperature coefficient of frequency (TCF) of AlN is −25 ppm/°C, which is high and limits its RF and sensing application. In contrast, the TCF of heavily doped silicon is significantly lower than the TCF of AlN. As a result, this study uses an AlN contour mode ring type resonator with heavily doped silicon as its bottom electrode in order to reduce the TCF of an AlN resonator. A simple microfabrication process based on Silicon-on-Insulator (SOI) is presented. A thickness ratio of 20:1 was chosen for the silicon bottom electrode to the AlN layer in order to make the TCF of the resonator mainly dependent upon heavily doped silicon. A cryogenic cooling test down to 77 K and heating test up to 400 K showed that the resonant frequency of the AlN resonator changed linearly with temperature change; the TCF was shown to be −9.1 ppm/°C. The temperature hysteresis characteristic of the resonator was also measured, and the AlN resonator showed excellent temperature stability. The quality factor versus temperature characteristic was also studied between 77 K and 400 K. It was found that lower temperature resulted in a higher quality factor, and the quality factor increased by 56.43%, from 1291.4 at 300 K to 2020.2 at 77 K.

A self-developed indoor three-dimensional pedestrian localization platform based on MEMS sensors

Sensor Review ◽  
2015 ◽  
Vol 35 (2) ◽  
pp. 157-167 ◽  
Author(s):  
Shengbo Sang ◽  
Ruiyong Zhai ◽  
Wendong Zhang ◽  
Qirui Sun ◽  
Zhaoying Zhou
Keyword(s):  
Low Cost ◽  
Angular Rate ◽  
Three Dimensional ◽  
Dead Reckoning ◽  
Rate Data ◽  
Mems Sensors ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Position Errors ◽  
Low Performance

Purpose – This study aims to design a new low-cost localization platform for estimating the location and orientation of a pedestrian in a building. The micro-electro-mechanical systems (MEMS) sensor error compensation and the algorithm were improved to realize the localization and altitude accuracy. Design/methodology/approach – The platform hardware was designed with common low-performance and inexpensive MEMS sensors, and with a barometric altimeter employed to augment altitude measurement. The inertial navigation system (INS) – extended Kalman filter (EKF) – zero-velocity updating (ZUPT) (INS-EKF-ZUPT [IEZ])-extended methods and pedestrian dead reckoning (PDR) (IEZ + PDR) algorithm were modified and improved with altitude determined by acceleration integration height and pressure altitude. The “AND” logic with acceleration and angular rate data were presented to update the stance phases. Findings – The new platform was tested in real three-dimensional (3D) in-building scenarios, achieved with position errors below 0.5 m for 50-m-long route in corridor and below 0.1 m on stairs. The algorithm is robust enough for both the walking motion and the fast dynamic motion. Originality/value – The paper presents a new self-developed, integrated platform. The IEZ-extended methods, the modified PDR (IEZ + PDR) algorithm and “AND” logic with acceleration and angular rate data can improve the high localization and altitude accuracy. It is a great support for the increasing 3D location demand in indoor cases for universal application with ordinary sensors.

scholarly journals Yttrium Doped TiO2 Thin Film for Gas Sensing Application Prepared by Spin Coating Method

2020 ◽  
Author(s):  
M Abdul Kaiyum ◽  
Naim Ahmed ◽  
Arif Alam ◽  
M Shamimur Rahman
Keyword(s):  
Thin Film ◽  
Photoelectron Spectroscopy ◽  
Gas Sensing ◽  
Low Cost ◽  
Pure Titanium ◽  
X Ray ◽  
Sensing Applications ◽  
Coating Method ◽  
Set Up ◽  
Spin Coater

Abstract Yttrium (Y) doped and pure Titanium Di-oxide (TiO2) thin films were prepared by using spin coater. The coater was set up in laboratory with low cost investment. The films were calcined at 450 °C for 1 hour. For characterization, Scanning Electron Microscopy (SEM), Energy Dispersive X-Ray Analysis (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Atomic Force Microscopy (AFM) were carried out. LCR Bridge - GW Instek LCR-821 was used for gas sensing applications. XPS showed that the change of electronic structure due to Y doping. SEM and AFM analysis were carried out to determine the surface morphology of the films. Yttrium (Y) decreased the crystallite size of the films and increased the surface roughness and porosity value, which was very good for many sensing applications. Gas sensing property of the deposited films were improved by the incorporation of yttrium impurities and the sensing property improved almost two times than pure TiO2 thin film. Different researches have been done their research related to this topic but no one researchers provide a precise explanation of their results, authors of this research have tried to do that. Moreover the films were prepared by a simple spin coater to reduce the production cost also.

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