scholarly journals Investigation of Microcrystalline Silicon Thin Film Fabricated by Magnetron Sputtering and Copper-Induced Crystallization for Photovoltaic Applications

2020 ◽  
Vol 10 (18) ◽  
pp. 6320
Author(s):  
Omid Shekoofa ◽  
Jian Wang ◽  
Dejie Li ◽  
Yi Luo

Microcrystalline silicon, which is widely used in the microelectronics industry, is usually fabricated by chemical vapor deposition techniques. In recent years, magnetron sputtering has been considered as an alternative because it is a simpler, cheaper and more eco-friendly technique. The big drawback of this technique, however, is the need to recrystallize the as-deposited amorphous silicon, which can be done by metal-induced crystallization. Among the different suitable metals, copper has not been extensively investigated for this purpose. Furthermore, the applicability of the microcrystalline film prepared by this method has not been evaluated for photovoltaic device fabrication. Therefore, this paper reports the fabrication of p-type microcrystalline silicon thin film by magnetron sputtering and copper-induced crystallization techniques, and evaluates its appropriateness for solar cell fabrication. In the first step, 60 nm of silicon followed by 10 nm of copper were deposited on n-type silicon wafer and glass substrates, both by the magnetron sputtering technique. Then, the as-deposited samples were annealed at temperatures from 450 °C to 950 °C. The crystal properties of the resulting films were characterized by Raman and X-ray diffraction spectroscopies and optical and secondary emission microscopies, while their electrical characteristics were determined by Hall-effect, J-V curve and external quantum efficiency measurements. These characterizations confirmed the formation of a layer of microcrystalline silicon mostly in the <111> direction with a crystallization ratio of 93% and a largest grain size of 20 nm. The hole concentration and mobility of the fabricated p-type microcrystalline silicon layer were about 1017~1019 cm−3 and 8 cm2/V.s, respectively. By using the fabricated film as the emitter layer of a p-n junction solar cell, a good rectification ratio of 4100 and reverse saturation current density of 85 nA.cm−2 were measured under dark conditions. The highest photovoltaic conversion efficiency, i.e., 2.6%, with an open-circuit voltage of 440 mV and short-circuit current density of 16.7 mA/cm2, were measured under AM1.5G irradiance. These results indicate that microcrystalline silicon created by magnetron sputtering and copper-induced crystallization has considerable potential for photovoltaic device fabrication.

2010 ◽  
pp. NA-NA
Author(s):  
O. Moustapha ◽  
A. Abramov ◽  
D. Daineka ◽  
M. Oudwan ◽  
Y. Bonnassieux ◽  
...  

2007 ◽  
Vol 989 ◽  
Author(s):  
Ivan Gordon ◽  
Lode Carnel ◽  
Dries Van Gestel ◽  
Guy Beaucarne ◽  
Jef Poortmans

AbstractEfficient thin-film polycrystalline-silicon (pc-Si) solar cells on inexpensive substrates could lower the price of photovoltaic electricity substantially. At the MRS conference in 2006, we presented a pc-Si solar cell with an efficiency of 5.9% that had an absorber layer made by aluminum-induced crystallization (AIC) of amorphous silicon followed by high-temperature epitaxial thickening. The efficiency of this cell was mainly limited by the current density. To obtain higher efficiencies, we therefore need to implement an effective light trapping scheme in our pc-Si solar cell process. In this work, we describe how we recently enhanced the current density and efficiency of our cells. We achieved a cell efficiency of 8.0% for pc-Si cells in substrate configuration. Our cell process is based on pc-Si layers made by AIC and thermal CVD on smoothened alumina substrates. The cells are in substrate configuration with deposited a-Si heterojunction emitters and interdigitated top contacts. The front surface of the cells is plasma textured which leads to an increase in current density. The current density is further enhanced by minimizing the back surface field thickness of the cells to reduce the light loss in this layer. Our present pc-Si solar cell efficiency together with the fast progression that we have made over the last few years indicate the large potential of pc-Si solar cells based on the AIC seed layer approach.


1996 ◽  
Vol 452 ◽  
Author(s):  
H. Keppner ◽  
P. Torres ◽  
J. Meier ◽  
R. Platz ◽  
D. Fischer ◽  
...  

AbstractIn the past, microcrystalline silicon (μc-Si:H) has been successfully used as active semiconductor in entirely μc-Si:H p-i-n solar cells and a new type of tandem solar cell, called the “micromorph” cell, was introduced [1]. Micromorph cells consist of an amorphous silicon top cell and a microcrystalline bottom cell. In the paper a micromorph cell with a stable efficiency of 10.7 % (confirmed by ISE Freiburg) is reported.Among sofar existing crystalline silicon-based solar cell manufacturing techniques, the application of microcrystalline silicon is a new promising way towards implementing thin-film silicon solar cells with a low temperature deposition. Microcrystalline silicon can, indeed, be deposited at temperatures as low as 220°C; hence, the way is here open to use cheap substrates as, e.g. plastic or glass. In the present paper, the development of single and tandem cells containing microcrystalline silicon is reviewed. As stated in previous publications, microcrystalline silicon technique has at present a severe drawback that has yet to be overcome: Its deposition rate for solar-grade material is about 2Å/s; in a more recent case 4.3 Å/s [2] could be obtained. In the present paper, using suitable mixtures of silane, hydrogen and argon, deposition rates of 9.4 Å/s are presented. Thereby the dominating plasma mechanism and the basic properties of resulting layers are described in detail. A first entirely microcrystalline cell deposited at 8.7 Å/s has an efficiency of 3.15%.


2002 ◽  
Vol 715 ◽  
Author(s):  
Torsten Brammer ◽  
Helmut Stiebig

AbstractAbsorber layers of microcrystalline silicon thin-film solar cells deposited by plasma-enhanced chemical vapor deposition are characterized regarding the recombination lifetime. The characterization is based on a comparison of experimentally determined solar cell characteristics with results from numerical device simulations. Evaluation of the dark reverse saturation current indicates a strong dependence of τ on the hydrogen dilution during the deposition. Close to the transition region to amorphous growth where the highest solar cell efficiencies are observed τ is maximum within the crystalline deposition regime and equals 30 ns.


2015 ◽  
Vol 2015 ◽  
pp. 1-5 ◽  
Author(s):  
Shanglong Peng ◽  
Desheng Wang ◽  
Fuhua Yang ◽  
Zhanguo Wang ◽  
Fei Ma

Hydrogenated microcrystalline silicon thin films can be used to fabricate stable thin film solar cell, which were deposited by very high frequency plasma-enhanced chemical vapor deposition at low temperatures (~200°C). It has been found that the obtained film presented excellent structural and electrical properties, such as high growth rate and good crystallinity. With the decreasing of silane concentration, the optical gap and the dark conductivity increased, whereas the activation energy decreased. A reasonable explanation was presented to elucidate these phenomena. In addition, we fabricated p-i-n structure solar cells using the optimum microcrystalline silicon thin films, and preliminary efficiency of 4.6% was obtained for 1 μm thick microcrystalline silicon thin film solar cells with open-circuits voltage of 0.773 V and short-circuits current density of 12.28 mA/cm2. Future scope for performance improvement lies mainly in further increasing the short-circuit current.


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