scholarly journals Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

Materials ◽  
2020 ◽  
Vol 13 (17) ◽  
pp. 3697
Author(s):  
Stefano Salvatori ◽  
Sara Pettinato ◽  
Armando Piccardi ◽  
Vadim Sedov ◽  
Alexey Voronin ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Electromagnetic Interference ◽  
Chemical Vapor ◽  
High Hardness ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Silicon Substrates ◽  
Sensing Element ◽  
Optoelectronic System ◽  
Sensor Fabrication

Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is defined by the end-face of a single mode fiber and the diamond diaphragm surface. Hence, pressure is evaluated by measuring the cavity length by an optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of Chemical Vapor Deposition (CVD) diamond, in terms of high hardness, low thermal expansion, and ultra-high thermal conductivity, the realized sensors have been characterized up to 16.5 MPa at room temperature. Preliminary characterizations demonstrate the feasibility of such diamond-on-Si membrane structure for pressure transduction. The proposed sensing system represents a valid alternative to conventional solutions, overcoming the drawback related to electromagnetic interference on the acquired weak signals generated by standard piezoelectric sensors.

scholarly journals High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide

2020 ◽  
Vol 10 (20) ◽  
pp. 7095
Author(s):  
Stefano Salvatori ◽  
Gennaro Salvatore Ponticelli ◽  
Sara Pettinato ◽  
Silvio Genna ◽  
Stefano Guarino
Keyword(s):  
Silicon Carbide ◽  
Electromagnetic Interference ◽  
Pressure Sensors ◽  
High Hardness ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Optoelectronic System ◽  
Cavity Depth ◽  
Sensor Structure ◽  
Sintered Silicon

In this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry of sensors. FP cavity is defined by the end-face of a single mode fiber and the S-SiC diaphragm surface. Hence, pressure is evaluated by measuring the cavity depth by a dedicated optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of S-SiC, in terms of high hardness, low thermal expansion, and high thermal conductivity, realized devices have been characterized up to 20 MPa. Experimental results demonstrate that produced sensors exhibit a non-linearity around ±0.6%F.S. and a high input dynamics. The all-optic sensing system proposed in this work would represent a good alternative to conventional solutions based on piezoelectric effects, overcoming the drawback related to electromagnetic interference on the acquired signals. In addition, the mechanical characteristics of S-SiC allow the use of the sensor in both automotive and aerospace hostile environments as pressure monitors in combustion engines.

Improved Sensitivity Distributed Pressure Sensor Using Off-Axis Coated Single Mode Fiber

2020 ◽  
Author(s):  
N.A. Mustaffa ◽  
M.R. Mokhtar ◽  
M.F. Azman ◽  
Z. Yusoff ◽  
H.A. Abdul Rashid ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Distributed Pressure

Orientation-free pressure sensor based on π-shifted single-mode-fiber Sagnac interferometer

2010 ◽  
Vol 49 (27) ◽  
pp. 5043 ◽  
Author(s):  
Jiulin Gan ◽  
Li Shen ◽  
Qing Ye ◽  
Zhengqing Pan ◽  
Haiwen Cai ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Sagnac Interferometer

Intrinsic single-mode fiber-optic pressure sensor

2001 ◽  
Vol 13 (11) ◽  
pp. 1212-1214 ◽  
Author(s):  
Yang Zhao ◽  
F. Ansari
Keyword(s):  
Pressure Sensor ◽  
Fiber Optic ◽  
Single Mode ◽  
Single Mode Fiber

scholarly journals A High-Sensitive Pressure Sensor Using a Single-Mode Fiber Embedded Microbubble with Thin Film Characteristics

Sensors ◽  
2017 ◽  
Vol 17 (6) ◽  
pp. 1192 ◽  
Author(s):  
Guanjun Wang ◽  
Xinglin Liu ◽  
Zhiguo Gui ◽  
Yongquan An ◽  
Jinyu Gu ◽  
...  
Keyword(s):  
Thin Film ◽  
Pressure Sensor ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Film Characteristics ◽  
Sensitive Pressure

scholarly journals Selective Deposition of Hard Boron-Carbon Microstructures on Silicon

Materials ◽  
2021 ◽  
Vol 14 (6) ◽  
pp. 1397
Author(s):  
Gopi Samudrala ◽  
Kallol Chakrabarty ◽  
Paul A. Baker ◽  
Bernabe S. Tucker ◽  
Yogesh K. Vohra ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
High Hardness ◽  
Strength Properties ◽  
Silicon Substrates ◽  
Microelectromechanical System ◽  
Cvd Method ◽  
Carbon Compounds ◽  
Characterization Studies ◽  
Microfabrication Techniques ◽  
Boron Carbon

Boron-rich B-C compounds with high hardness have been recently synthesized by the chemical vapor deposition (CVD) method. In this paper, we present our successful efforts in the selective growth of microstructures of boron-carbon compounds on silicon substrates. This was achieved by combining microfabrication techniques such as maskless lithography and sputter deposition with the CVD technique. Our characterization studies on these B-C microstructures showed that they maintain structural and mechanical properties similar to that of their thin-film counterparts. The methodology presented here paves the way for the development of microstructures for microelectromechanical system (MEMS) applications which require custom hardness and strength properties. These hard B-C microstructures are an excellent choice as support structures in MEMS-based devices.

scholarly journals A High Precision Fiber Optic Fabry–Perot Pressure Sensor Based on AB Epoxy Adhesive Film

Photonics ◽  
2021 ◽  
Vol 8 (12) ◽  
pp. 581
Author(s):  
Yanan Zhang ◽  
Shubin Zhang ◽  
Haitao Gao ◽  
Danping Xu ◽  
Zhuozhen Gao ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Epoxy Adhesive ◽  
Curing Time ◽  
Adhesive Film ◽  
Interference Spectrum ◽  
Fabry Perot ◽  
Potential Applications

This paper proposes a Fabry–Perot pressure sensor based on AB epoxy adhesive with ultra-high sensitivity under low pressure. Fabry–Perot interference, located between single-mode fiber (SMF) and hollow-core fiber (HCF), is an ultra-thin AB epoxy film formed by capillary action. Then the thick HCF was used to fix the HCF and SMF at both ends with AB epoxy adhesive. Experimental results show that when the thickness of AB epoxy film is 8.74 μm, and the cavity length is 30 μm, the sensor has the highest sensitivity. The sensitivity is 257.79 nm/MPa within the pressure range of 0–70 kPa. It also investigated the influence of the curing time of AB epoxy on the interference spectrum. Experiments showed that the interference spectrum peak is blue-shifted with the increase of curing time. Our study also demonstrated the humidity stability of this pressure sensor. These characteristics mean that our sensor has potential applications in the biomedical field and ocean exploration.

Pressure Sensor Based on Cascading Single Mode Fiber with Multimode Fiber

2015 ◽  
Vol 44 (4) ◽  
pp. 406005
Author(s):  
付兴虎 FU Xing-hu ◽  
谢海洋 XIE Hai-yang ◽  
王柳柳 WANG Liu-liu ◽  
付广伟 FU Guang-wei ◽  
毕卫红 BI Wei-hong
Keyword(s):  
Pressure Sensor ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Multimode Fiber

scholarly journals Microscale diamond protection for a ZnO coated fiber optic sensor

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Monika Kosowska ◽  
Paulina Listewnik ◽  
Daria Majchrowicz ◽  
Michał Rycewicz ◽  
Mikhael Bechelany ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Microwave Plasma ◽  
Mechanical Damage ◽  
Chemical Vapor ◽  
Single Mode ◽  
Atomic Layer ◽  
Single Mode Fiber ◽  
Optical Measurements ◽  
Fiber Optic Sensor ◽  
Sensor Structure

Abstract Fiber optic sensors are widely used in environmental, biological and chemical sensing. Due to the demanding environmental conditions in which they can be used, there is a risk of damaging the sensor measurement head placed in the measuring field. Sensors using nanolayers deposited upon the fiber structure are particularly vulnerable to damage. A thin film placed on the surface of the fiber end-face can be prone to mechanical damage or deteriorate due to unwanted chemical reactions with the surrounding agent. In this paper, we investigated a sensor structure formed with a Zinc Oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) on the tip of a single-mode fiber. A nanocrystalline diamond sheet (NDS) attached over the ZnO is described. The diamond structure was synthesized in a Microwave Plasma Assisted Chemical Vapor Deposition System. The deposition processes of the nanomaterials, the procedure of attaching NDS to the fiber end-face covered with ZnO, and the results of optical measurements are presented.

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