scholarly journals Obtainment of Residual Stress Distribution from Surface Deformation under Continuity Constraints for Thinned Silicon Wafers

Machines ◽  
2021 ◽  
Vol 9 (11) ◽  
pp. 284
Author(s):  
Haijun Liu ◽  
Tao Yang ◽  
Jiang Han ◽  
Xiaoqing Tian ◽  
Shan Chen ◽  
...  

Precision machining (e.g., fine grinding, polishing) induced residual stress is very small and often not constant across the wafer and it is difficult to be directly obtained by stress testing equipment or Stoney equation. The residual stress could be obtained theoretically based on the principle of superposition in which the entire wafer deformation is taken as the sum of all deformations induced by the residual stresses of different positions on the wafer surface. However, the solved residual stress is affected greatly by deformation measurement errors and fluctuates greatly across the wafer surface. To solve the problem, a regularization method with continuity constraints was proposed in this study. The mechanisms for the discontinuity of the residual stress distribution and the sensitivity of calculation results to the measurement errors were studied. The influences of the number of subareas of the silicon wafer were investigated and the continuity constraint term was constructed based on the positional relationship of different subareas. Stable and continuous residual stress distribution was successfully obtained after using the proposed regularization method. The method may also be applied to estimate the residual stress from surface deformation for thin substrate plates of other materials.

2007 ◽  
Vol 345-346 ◽  
pp. 1469-1472
Author(s):  
Gab Chul Jang ◽  
Kyong Ho Chang ◽  
Chin Hyung Lee

During manufacturing the welded joint of steel structures, residual stress is produced and weld metal is used inevitably. And residual stress and weld metal influence on the static and dynamic mechanical behavior of steel structures. Therefore, to predict the mechanical behavior of steel pile with a welded joint during static and dynamic deformation, the research on the influence of the welded joints on the static and dynamic behavior of steel pile is clarified. In this paper, the residual stress distribution in a welded joint of steel piles was investigated by using three-dimensional welding analysis. The static and dynamic mechanical behavior of steel piles with a welded joint is investigated by three-dimensional elastic-plastic finite element analysis using a proposed dynamic hysteresis model. Numerical analyses of the steel pile with a welded joint were compared to that without a welded joint with respect to load carrying capacity and residual stress distribution. The influence of the welded joint on the mechanical behavior of steel piles during static and dynamic deformation was clarified by comparing analytical results


Author(s):  
A.G. Ramu ◽  
Sunwoo Kim ◽  
Heungwoo Jeon ◽  
Amal M. Al-Mohaimeed ◽  
Wedad A. Al-onazi ◽  
...  

Author(s):  
René Selbmann ◽  
Markus Baumann ◽  
Mateus Dobecki ◽  
Markus Bergmann ◽  
Verena Kräusel ◽  
...  

AbstractThe residual stress distribution in extruded components and wires after a conventional forming process is frequently unfavourable for subsequent processes, such as bending operations. High tensile residual stresses typically occur near the surface of the wire and thus limit further processability of the material. Additional heat treatment operations or shot peening are often inserted to influence the residual stress distribution in the material after conventional manufacturing. This is time and energy consuming. The research presented in this paper contains an approach to influence the residual stress distribution by modifying the forming process for wire-like applications. The aim of this process is to lower the resulting tensile stress levels near the surface or even to generate compressive stresses. To achieve these residual compressive stresses, special forming elements are integrated in the dies. These modifications in the forming zone have a significant influence on process properties, such as degree of deformation and deformation direction, but typically have no influence on the diameter of the product geometry. In the present paper, the theoretical approach is described, as well as the model set-up, the FE-simulation and the results of the experimental tests. The characterization of the residual stress states in the specimen was carried out by X-ray diffraction using the sin2Ψ method.


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