scholarly journals Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Micromachines ◽  
2020 ◽  
Vol 11 (4) ◽  
pp. 362 ◽  
Author(s):  
Masaaki Hashimoto ◽  
Yoshihiro Taguchi
Keyword(s):  
Fill Factor ◽  
Vertical Displacement ◽  
Large Displacement ◽  
Microelectromechanical System ◽  
Stress Control ◽  
Japanese Art ◽  
Out Of Plane ◽  
High Fill Factor ◽  
Optical Applications ◽  
Mems Process

Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner’s feasibility and potential for large-displacement scanning with a high fill factor.

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

2005 ◽  
Author(s):  
Jessica R. Bronson ◽  
Gloria J. Wiens ◽  
James J. Allen
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Plate ◽  
Fill Factor ◽  
Electrostatic Model ◽  
Comb Drive ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Comb Drives ◽  
High Fill Factor

Micro mirrors have emerged as key components for optical microelectromechanical system (MEMS) applications. Electrostatic vertical comb drives are attractive because they can be fabricated underneath the mirror, allowing for arrays with a high fill factor. Also, vertical comb drives are more easily controlled than parallel plate actuators, making them the better choice for analog scanning devices. The device presented in this paper is a one-degree of freedom vertical comb drive fabricated using Sandia National Laboratories SUMMiT™ five-level surface micromachining process. The electrostatic performance of the device is investigated using finite element analysis to determine the capacitance for a unit cell of the comb drive as the position of the device is varied. This information is then used to design a progressive linkage that will seek to alleviate or eliminate the effects of instability. The goal of this research is to develop an electrostatic model for the behavior of the vertical comb drive mirror and then use this to design a progressive-linkage that can delay or eliminate the pull-in instability.

Large Displacement Out-Of-Plane Bimorph Actuator for Optical Application

2006 ◽  
Vol 326-328 ◽  
pp. 1383-1386
Author(s):  
Won Kyu Jeung ◽  
Yong Jun Kim ◽  
Seog Moon Choi
Keyword(s):  
Large Deflection ◽  
Coefficient Of Thermal Expansion ◽  
Vertical Displacement ◽  
Micro Electro Mechanical System ◽  
Large Displacement ◽  
Small Temperature ◽  
Out Of Plane ◽  
Micro Actuators ◽  
Plane Displacement ◽  
Device Size

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

scholarly journals High-fill factor micro-mirror array for multi object spectroscopy

2006 ◽  
Author(s):  
Severin Waldis ◽  
Pierre-Andre Clerc ◽  
Frederic Zamkotsian ◽  
Michael Zickar ◽  
Wilfried Noell ◽  
...  
Keyword(s):  
Fill Factor ◽  
High Fill Factor

A high fill factor linear mirror array for a wavelength selective switch

2003 ◽  
Vol 14 (1) ◽  
pp. 147-152 ◽  
Author(s):  
William P Taylor ◽  
John D Brazzle ◽  
Amy Bowman Osenar ◽  
Christopher J Corcoran ◽  
Ijaz H Jafri ◽  
...  
Keyword(s):  
Fill Factor ◽  
High Fill Factor ◽  
Wavelength Selective Switch

A New Fullerene-Free Bulk-Heterojunction System for Efficient High-Voltage and High-Fill Factor Solution-Processed Organic Photovoltaics

2015 ◽  
Vol 27 (11) ◽  
pp. 1900-1907 ◽  
Author(s):  
Zheng Tang ◽  
Bo Liu ◽  
Armantas Melianas ◽  
Jonas Bergqvist ◽  
Wolfgang Tress ◽  
...  
Keyword(s):  
High Voltage ◽  
Organic Photovoltaics ◽  
Fill Factor ◽  
Bulk Heterojunction ◽  
Factor Solution ◽  
Solution Processed ◽  
High Fill Factor

scholarly journals Highly Efficient Porphyrin-Based OPV/Perovskite Hybrid Solar Cells with Extended Photoresponse and High Fill Factor

2017 ◽  
Vol 29 (47) ◽  
pp. 1703980 ◽  
Author(s):  
Ke Gao ◽  
Zonglong Zhu ◽  
Bo Xu ◽  
Sae Byeok Jo ◽  
Yuanyuan Kan ◽  
...  
Keyword(s):  
Solar Cells ◽  
Fill Factor ◽  
Hybrid Solar Cells ◽  
Highly Efficient ◽  
High Fill Factor

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

2011 ◽  
Vol 167 (2) ◽  
pp. 495-501 ◽  
Author(s):  
Yiping Zhu ◽  
Wenjing Liu ◽  
Kemiao Jia ◽  
Wenjun Liao ◽  
Huikai Xie
Keyword(s):  
Fill Factor ◽  
Lateral Shift ◽  
High Fill Factor ◽  
Piezoelectric Unimorph

A heptacyclic carbon–oxygen-bridged ladder-type building block for A–D–A acceptors

2018 ◽  
Vol 2 (9) ◽  
pp. 1716-1719 ◽  
Author(s):  
Ke Jin ◽  
Chenyu Deng ◽  
Lei Zhang ◽  
Dan Li ◽  
Ting Li ◽  
...  
Keyword(s):  
Solar Cells ◽  
Organic Solar Cells ◽  
Building Block ◽  
Fill Factor ◽  
High Fill Factor

A–D–A acceptors based on a heptacyclic carbon–oxygen-bridged ladder-type unit, COi7, can give a high fill factor in organic solar cells.

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