scholarly journals Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 507
Author(s):  
Rihachiro Nakashima ◽  
Hidetoshi Takahashi
Keyword(s):  
Bridge Circuit ◽  
Angular Acceleration ◽  
Rotational Axis ◽  
Acceleration Sensor ◽  
Acceleration Measurement ◽  
Microelectromechanical System ◽  
A Value ◽  
Acceleration Sensors ◽  
Rotational Vibration ◽  
Piezoresistive Cantilevers

Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10−5/(rad/s2), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.

Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers

2019 ◽  
Vol 287 ◽  
pp. 39-47 ◽  
Author(s):  
Hidetoshi Takahashi ◽  
Tetsuo Kan ◽  
Akihito Nakai ◽  
Tomoyuki Takahata ◽  
Takanori Usami ◽  
...  
Keyword(s):  
Angular Acceleration ◽  
Acceleration Sensor ◽  
Highly Sensitive ◽  
Piezoresistive Cantilevers ◽  
Liquid Ring

Structure Design of Piezoresistive High-g Acceleration Sensor and Finite Element Analysis

2012 ◽  
Vol 466-467 ◽  
pp. 1358-1362
Author(s):  
Li Shuang Liu ◽  
Han Chang Zhou ◽  
Jing Han Ye ◽  
Hua Ling Guo
Keyword(s):  
Impact Test ◽  
Structure Design ◽  
High Impact ◽  
Structure Parameters ◽  
Acceleration Sensor ◽  
Ansys Software ◽  
Acceleration Measurement ◽  
Element Analysis ◽  
Acceleration Sensors ◽  
Test Requirements

On the basis of the acceleration measurement of high impact, a high-g acceleration sensors of the piezoresistive beam - island structure at four-terminal all fixed supported was designed. Its structure was analyzed. The reasonable structure parameters were chose. And the parameter simulation and modal analysis were completed with ANSYS software. The results show that the sensor can resist 200,000 g overload and meet high impact test requirements.

Active Vibration/Noise Control of Axial Piston Machine Using Swash Plate Control

2017 ◽  
Author(s):  
Taeho Kim ◽  
Monika Ivantysynova
Keyword(s):  
Vibration Control ◽  
High Speed ◽  
Active Vibration Control ◽  
Anechoic Chamber ◽  
Direct Drive ◽  
Acceleration Sensor ◽  
Acceleration Measurement ◽  
Swash Plate ◽  
Acceleration Sensors ◽  
Active Vibration

In this paper, active vibration control concept using the existing pump control system based on the multi-frequency two-weight notch LMS (Least Mean Square) filter was investigated and tested experimentally. This research also includes the direct swash plate acceleration measurement, the case acceleration measurement, and the simultaneous multi-position microphone measurement in the semi-anechoic chamber. A 75 cc/rev swash plate type axial pump was modified to implement swash plate active vibration control combining a high speed direct drive servovalve, an electronic swash plate angle sensor, a swash plate acceleration sensor, and a high speed real-time controller with the NI Labview FPGA. Vibration measurements utilizing a tri-axial swash plate acceleration sensor and two tri-axial case acceleration sensors, and noise measurements using three microphones were conducted in the semi-anechoic chamber to investigate the influence and effectiveness of the developed system and the proposed swash plate active vibration control.

scholarly journals Design of Measurement Memory System Based on MEMS Acceleration Sensor

2018 ◽  
Vol 14 (09) ◽  
pp. 110 ◽  
Author(s):  
Lei Xu ◽  
Liqing Fang ◽  
Xu Li ◽  
Ruikun Huo ◽  
Ziyuan Qi ◽  
...  
Keyword(s):  
Real Time ◽  
Rapid Development ◽  
Memory System ◽  
Acceleration Sensor ◽  
Acceleration Measurement ◽  
Display Module ◽  
Acceleration Sensors ◽  
Mems Technology ◽  
Allowable Error ◽  
Overload Capacity

With the rapid development of MEMS technology, MEMS acceleration sensors have been used more and more widely due to their unique advantages. Taking MEMS acceleration sensor as the core device, a measurement memory system was designed. The system mainly included acceleration detection module, acceleration memory module and control display module, which could realize real-time acceleration measurement and memory, and uploaded the stored data to the computer. Using the vibration test to detect the performance of the system, the result showed that the  system could achieve the desired effect, and could realize real-time acceleration measurement and memory within the allowable  error range. It could still work normally under the condition of the maximum overload of at least 100g, which possessed strong resistance to high overload capacity

Investigations on the Receptors of the Vestibular Apparatus as Angular Acceleration Sensors

1968 ◽  
Vol 2 (4) ◽  
pp. 311-317
Author(s):  
V.M. Gusev ◽  
V.A. Kislyakov ◽  
M.M. Levashov ◽  
I.V. Orlov ◽  
R.I. Polonnikov
Keyword(s):  
Angular Acceleration ◽  
Vestibular Apparatus ◽  
Acceleration Sensors

scholarly journals Research Status and Development Trend of Magnetic Fluid Acceleration Sensors

2021 ◽  
pp. 10-15
Author(s):  
Mu Xueyu ◽  
Yang Shaojie ◽  
Kong Xiangdong
Keyword(s):  
General Structure ◽  
Inertial Mass ◽  
Development Trend ◽  
Research Progress ◽  
Acceleration Sensor ◽  
Magnetic Liquid ◽  
Existing Problems ◽  
Acceleration Sensors ◽  
New Type ◽  
The Difference

As a new type of accelerometer, in recent years, the magnetic liquid acceleration sensor has attracted widespread attention worldwide, and related research results have also continued to emerge. This article mainly introduces the theoretical basis and general structure of the magnetic liquid acceleration sensor, and according to the difference of inertial mass, briefly describes the research progress of the magnetic liquid acceleration sensor by national and foreign scholars in recent years and some in existing problems. Finally, suggestions and prospects for the future development trend of the magnetic liquid acceleration sensor are given.

scholarly journals A Smart IoT Device for Detecting and Responding to Earthquakes

Electronics ◽  
2019 ◽  
Vol 8 (12) ◽  
pp. 1546 ◽  
Author(s):  
Jangsoo Lee ◽  
Irshad Khan ◽  
Seonhwa Choi ◽  
Young-Woo Kwon
Keyword(s):  
Low Cost ◽  
Warning System ◽  
Acceleration Sensor ◽  
Earthquake Early Warning System ◽  
Detection Model ◽  
Earthquake Detection ◽  
Warning Message ◽  
Acceleration Sensors ◽  
Learning Technique ◽  
Noise Data

The advancement of hardware and software technologies makes it possible to use smartphones or Internet of things for monitoring environments in realtime. In recent years, much effort has been made to develop a smartphone based earthquake early warning system, where low-cost acceleration sensors inside a smartphones are used for capturing earthquake signals. However, because a smartphone comes with a powerful CPU, spacious memory, and several sensors, it is waste of such resources to use it only for detecting earthquakes. Furthermore, because a smartphone is mostly in use during the daytime, the acquired data cannot be used for detecting earthquakes due to human activities. Therefore, in this article, we introduce a stand-alone device equipped with a low-cost acceleration sensor and least computing resources to detect earthquakes. To that end, we first select an appropriate acceleration sensor by assessing the performance and accuracy of four different sensors. Then, we design and develop an earthquake alert device. To detect earthquakes, we employ a simple machine learning technique which trains an earthquake detection model with daily motions, noise data recorded in buildings, and earthquakes recorded in the past. Furthermore, we evaluate the four acceleration sensors by recording two realistic earthquakes on a shake-table. In the experiments, the results show that the developed earthquake alert device can successfully detect earthquakes and send a warning message to nearby devices, thereby enabling proactive responses to earthquakes.

LC-Resonant and High-Temperature Resistant Acceleration Sensor Based on DSP

2011 ◽  
Vol 105-107 ◽  
pp. 1966-1969
Author(s):  
Tao Guo ◽  
Jie Zhu ◽  
Gui Tang ◽  
Yan Xu
Keyword(s):  
High Temperature ◽  
High Speed ◽  
Space Shuttle ◽  
Digital Signal ◽  
Acceleration Sensor ◽  
Pass Filter ◽  
Low Pass Filter ◽  
Analog To Digital ◽  
Acceleration Sensors ◽  
Low Pass

It is a challenging problem to test the acceleration of the high-speed missiles and space shuttle under high temperature. This paper proposed a design of LC-resonant and high-temperature resistant acceleration sensors about the phenomenon. With the operational amplifier OP4177, it produces the input signal that contents with A/D (Analog to Digital) signal. An eight level low-pass filter MAX291 is used for testing after the signal is regulated. This design mainly uses AD7934 to complete the conversion from analog signals to digital signals. It also recognizes the resonant point of LC acceleration sensor by the DSP （Digital Signal Processing）recognizing program. The acceleration is computed finally by the DSP chip.

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